Uncooled infrared thermo-mechanical detector array: Design, fabrication and testing

M. Fatih Toy; Onur Ferhanoglu; Hamdi Torun; Hakan Urey

doi:10.1016/j.sna.2009.02.010

Uncooled infrared thermo-mechanical detector array: Design, fabrication and testing

M. Fatih Toy
, Onur Ferhanoglu^*
, Hamdi Torun
, Hakan Urey

^*Bu çalışma için yazışmadan sorumlu yazar

Koc University
Georgia Institute of Technology

Araştırma sonucu: Dergiye katkı › Makale › bilirkişi

35 Atıf (Scopus)

Özet

Thermo-mechanical detector arrays in the 160 × 120 array format are designed, fabricated, and tested. Detectors are composed of SiN_x and TiN as absorbing layer, Al to form bimaterial legs, and integrated diffraction grating interferometer underneath each detector. The detector array is a passive component and the optical readout is performed remotely with a laser and CCD camera. All noise sources are considered in making a detailed noise equivalent temperature difference (NETD) estimation, which revealed <30 mK NETD is achievable using >12-bit CCD camera for the readout.

Orijinal dil	İngilizce
Sayfa (başlangıç-bitiş)	88-94
Sayfa sayısı	7
Dergi	Sensors and Actuators A: Physical
Hacim	156
Basın numarası	1
DOI'lar	https://doi.org/10.1016/j.sna.2009.02.010
Yayın durumu	Yayınlandı - Kas 2009
Harici olarak yayınlandı	Evet

Finansman

This work is sponsored by Aselsan Inc. (Turkey). We are grateful to Prof. Tayfun Akın and Orhan Akar from Middle East Technical University Microelectronics Center: METU-MET for fabrication of the arrays and VTT/Finland for providing vacuum packages. O.F. and M.F.T. acknowledges the support from TUBİTAK scholarship for graduate studies and H.U. acknowledges the support from TÜBA-GEBİP Distinguished Young Scientist award.

Finansörler
TUBİTAK
TÜBA-GEBİP
Aselsan

Belgeye Erişim

10.1016/j.sna.2009.02.010

Diğer Dosyalar ve Linkler

Link to publication in Scopus

Alıntı Yap

@article{b22d51971a4c4e94baf738e38db840d1,

title = "Uncooled infrared thermo-mechanical detector array: Design, fabrication and testing",

abstract = "Thermo-mechanical detector arrays in the 160 × 120 array format are designed, fabricated, and tested. Detectors are composed of SiNx and TiN as absorbing layer, Al to form bimaterial legs, and integrated diffraction grating interferometer underneath each detector. The detector array is a passive component and the optical readout is performed remotely with a laser and CCD camera. All noise sources are considered in making a detailed noise equivalent temperature difference (NETD) estimation, which revealed <30 mK NETD is achievable using >12-bit CCD camera for the readout.",

keywords = "CCD camera, Diffraction grating, NETD, Optical readout, Thermal detector",

author = "Toy, \{M. Fatih\} and Onur Ferhanoglu and Hamdi Torun and Hakan Urey",

year = "2009",

month = nov,

doi = "10.1016/j.sna.2009.02.010",

language = "English",

volume = "156",

pages = "88--94",

journal = "Sensors and Actuators A: Physical",

issn = "0924-4247",

publisher = "Elsevier B.V.",

number = "1",

}

TY - JOUR

T1 - Uncooled infrared thermo-mechanical detector array

T2 - Design, fabrication and testing

AU - Toy, M. Fatih

AU - Ferhanoglu, Onur

AU - Torun, Hamdi

AU - Urey, Hakan

PY - 2009/11

Y1 - 2009/11

N2 - Thermo-mechanical detector arrays in the 160 × 120 array format are designed, fabricated, and tested. Detectors are composed of SiNx and TiN as absorbing layer, Al to form bimaterial legs, and integrated diffraction grating interferometer underneath each detector. The detector array is a passive component and the optical readout is performed remotely with a laser and CCD camera. All noise sources are considered in making a detailed noise equivalent temperature difference (NETD) estimation, which revealed <30 mK NETD is achievable using >12-bit CCD camera for the readout.

AB - Thermo-mechanical detector arrays in the 160 × 120 array format are designed, fabricated, and tested. Detectors are composed of SiNx and TiN as absorbing layer, Al to form bimaterial legs, and integrated diffraction grating interferometer underneath each detector. The detector array is a passive component and the optical readout is performed remotely with a laser and CCD camera. All noise sources are considered in making a detailed noise equivalent temperature difference (NETD) estimation, which revealed <30 mK NETD is achievable using >12-bit CCD camera for the readout.

KW - CCD camera

KW - Diffraction grating

KW - NETD

KW - Optical readout

KW - Thermal detector

UR - https://www.scopus.com/pages/publications/69949164012

U2 - 10.1016/j.sna.2009.02.010

DO - 10.1016/j.sna.2009.02.010

M3 - Article

AN - SCOPUS:69949164012

SN - 0924-4247

VL - 156

SP - 88

EP - 94

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

IS - 1

ER -

Uncooled infrared thermo-mechanical detector array: Design, fabrication and testing

Özet

Finansman

Belgeye Erişim

Diğer Dosyalar ve Linkler

Parmak izi

Alıntı Yap