Two-wavelength grating interferometry for MEMS sensors

Onur Ferhanoglu; M. Fatih Toy; Hakan Urey

doi:10.1109/LPT.2007.908450

Two-wavelength grating interferometry for MEMS sensors

Onur Ferhanoglu^*
, M. Fatih Toy
, Hakan Urey

^*Bu çalışma için yazışmadan sorumlu yazar

Koc University

Araştırma sonucu: Dergiye katkı › Makale › bilirkişi

28 Atıf (Scopus)

Özet

Diffraction gratings integrated with micro-electro- mechanical-systems (MEMS) offer shot noise limited sub-nanometer displacement detection sensitivities but are limited in detection range for mechanical transducers. A two-wavelength readout method is developed that maintains high sensitivity while increasing the detection range, which is demonstrated using a MEMS spectrometer with integrated diffraction grating. The two-laser illumination extended the detection range from 105 nm to 1.7 μm assuming the readout sensitivity is maintained at >50% of the maximum sensitivity.

Orijinal dil	İngilizce
Sayfa (başlangıç-bitiş)	1895-1897
Sayfa sayısı	3
Dergi	IEEE Photonics Technology Letters
Hacim	19
Basın numarası	23
DOI'lar	https://doi.org/10.1109/LPT.2007.908450
Yayın durumu	Yayınlandı - 1 Ara 2007
Harici olarak yayınlandı	Evet

Finansman

Manuscript received July 19, 2007; revised August 29, 2007. This work was supported in part by ASELSAN Inc. The authors are with the Electrical Engineering Department, Koc University, Sariyer TR-34450, Istanbul, Turkey (e-mail: [email protected]; mtoy@ku. edu.tr; [email protected]). Digital Object Identifier 10.1109/LPT.2007.908450 Fig 1. (a) Side view of the setup with fixed grating and the moving platform for gap modulation. (b) MEMS IR spectrometer where alternating fingers of the grating are movable.

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10.1109/LPT.2007.908450

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Alıntı Yap

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title = "Two-wavelength grating interferometry for MEMS sensors",

abstract = "Diffraction gratings integrated with micro-electro- mechanical-systems (MEMS) offer shot noise limited sub-nanometer displacement detection sensitivities but are limited in detection range for mechanical transducers. A two-wavelength readout method is developed that maintains high sensitivity while increasing the detection range, which is demonstrated using a MEMS spectrometer with integrated diffraction grating. The two-laser illumination extended the detection range from 105 nm to 1.7 μm assuming the readout sensitivity is maintained at >50\% of the maximum sensitivity.",

keywords = "Grating interferometry, Gratings, Micro-electro-mechanical-(MEMS), Microelectromechanical systems, Optical interferometry, Optical sensing, Optical sensors, Semiconductor lasers, Sensitivity, Two-wavelength interferometry",

author = "Onur Ferhanoglu and Toy, \{M. Fatih\} and Hakan Urey",

year = "2007",

month = dec,

day = "1",

doi = "10.1109/LPT.2007.908450",

language = "English",

volume = "19",

pages = "1895--1897",

journal = "IEEE Photonics Technology Letters",

issn = "1041-1135",

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T1 - Two-wavelength grating interferometry for MEMS sensors

AU - Ferhanoglu, Onur

AU - Toy, M. Fatih

AU - Urey, Hakan

PY - 2007/12/1

Y1 - 2007/12/1

N2 - Diffraction gratings integrated with micro-electro- mechanical-systems (MEMS) offer shot noise limited sub-nanometer displacement detection sensitivities but are limited in detection range for mechanical transducers. A two-wavelength readout method is developed that maintains high sensitivity while increasing the detection range, which is demonstrated using a MEMS spectrometer with integrated diffraction grating. The two-laser illumination extended the detection range from 105 nm to 1.7 μm assuming the readout sensitivity is maintained at >50% of the maximum sensitivity.

AB - Diffraction gratings integrated with micro-electro- mechanical-systems (MEMS) offer shot noise limited sub-nanometer displacement detection sensitivities but are limited in detection range for mechanical transducers. A two-wavelength readout method is developed that maintains high sensitivity while increasing the detection range, which is demonstrated using a MEMS spectrometer with integrated diffraction grating. The two-laser illumination extended the detection range from 105 nm to 1.7 μm assuming the readout sensitivity is maintained at >50% of the maximum sensitivity.

KW - Grating interferometry

KW - Gratings

KW - Micro-electro-mechanical-(MEMS)

KW - Microelectromechanical systems

KW - Optical interferometry

KW - Optical sensing

KW - Optical sensors

KW - Semiconductor lasers

KW - Sensitivity

KW - Two-wavelength interferometry

UR - https://www.scopus.com/pages/publications/38049125816

U2 - 10.1109/LPT.2007.908450

DO - 10.1109/LPT.2007.908450

M3 - Article

AN - SCOPUS:38049125816

SN - 1041-1135

VL - 19

SP - 1895

EP - 1897

JO - IEEE Photonics Technology Letters

JF - IEEE Photonics Technology Letters

IS - 23

ER -

Two-wavelength grating interferometry for MEMS sensors

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