@inproceedings{5c6a629d265744ddbb245c41f17862c7,
title = "Thermal-mechanical detector array with integrated diffraction grating",
abstract = "An uncooled thermal detector array with low NETD is designed and fabricated using MEMS bimaterial structures. A diffraction grating is embedded on the pixel membrane for sensing sub-nm mechanical deflections. The first order reflected light was focused on a CCD camera to monitor the entire array. Results show that it is possible to achieve <50mK NETD using a 12 bit CCD camera.",
author = "O. Ferhanoglu and Toy, \{M. F.\} and G. Unal and H. Kalyoncu and G. Kabuli and Caliskan, \{A. U.\} and H. Urey",
year = "2007",
doi = "10.1109/LEOS.2007.4382668",
language = "English",
isbn = "142440925X",
series = "Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS",
pages = "836--837",
booktitle = "LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings",
note = "20th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS ; Conference date: 21-10-2007 Through 25-10-2007",
}