The design and analysis of a novel MEMS force amplifier

Ergin Kosa; Ümit Sonmez; Hüseyin Kizil; Levent Trabzon

doi:10.3906/muh-1005-22

The design and analysis of a novel MEMS force amplifier

Ergin Kosa^*, Ümit Sonmez, Hüseyin Kizil, Levent Trabzon

^*Bu çalışma için yazışmadan sorumlu yazar

Istanbul Technical University

Araştırma sonucu: Dergiye katkı › Makale › bilirkişi

2 Atıf (Scopus)

Özet

Compliant micromechanisms achieve high amplification of forces that can be used as a cutting force in micro- and nanofabrication. In the present study, we designed, simulated, and optimized a novel, simple micro-compliant system by SOI-MUMPs technology. The position and quasi-static analysis of a rigid body model were derived by MATLAB and simulated in ANSYS. It was found that an amplification factor of as much as 11.1 was achieved. The amplification factor increased as the micro-compliant force amplifier got closer to 0, but it decreased as the crank angle was further from 0.

Orijinal dil	İngilizce
Sayfa (başlangıç-bitiş)	253-259
Sayfa sayısı	7
Dergi	Turkish Journal of Engineering and Environmental Sciences
Hacim	34
Basın numarası	4
DOI'lar	https://doi.org/10.3906/muh-1005-22
Yayın durumu	Yayınlandı - 2010

BM SKH

Bu sonuç, aşağıdaki Sürdürülebilir Kalkınma Hedefine/Hedeflerine katkıda bulunur

Belgeye Erişim

10.3906/muh-1005-22

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Link to publication in Scopus

Alıntı Yap

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title = "The design and analysis of a novel MEMS force amplifier",

abstract = "Compliant micromechanisms achieve high amplification of forces that can be used as a cutting force in micro- and nanofabrication. In the present study, we designed, simulated, and optimized a novel, simple micro-compliant system by SOI-MUMPs technology. The position and quasi-static analysis of a rigid body model were derived by MATLAB and simulated in ANSYS. It was found that an amplification factor of as much as 11.1 was achieved. The amplification factor increased as the micro-compliant force amplifier got closer to 0, but it decreased as the crank angle was further from 0.",

keywords = "Compliant, Force amplifier, MEMS, Micromechanism, SOI-MUMPs technology",

author = "Ergin Kosa and {\"U}mit Sonmez and H{\"u}seyin Kizil and Levent Trabzon",

year = "2010",

doi = "10.3906/muh-1005-22",

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AU - Kosa, Ergin

AU - Sonmez, Ümit

AU - Kizil, Hüseyin

AU - Trabzon, Levent

PY - 2010

Y1 - 2010

N2 - Compliant micromechanisms achieve high amplification of forces that can be used as a cutting force in micro- and nanofabrication. In the present study, we designed, simulated, and optimized a novel, simple micro-compliant system by SOI-MUMPs technology. The position and quasi-static analysis of a rigid body model were derived by MATLAB and simulated in ANSYS. It was found that an amplification factor of as much as 11.1 was achieved. The amplification factor increased as the micro-compliant force amplifier got closer to 0, but it decreased as the crank angle was further from 0.

AB - Compliant micromechanisms achieve high amplification of forces that can be used as a cutting force in micro- and nanofabrication. In the present study, we designed, simulated, and optimized a novel, simple micro-compliant system by SOI-MUMPs technology. The position and quasi-static analysis of a rigid body model were derived by MATLAB and simulated in ANSYS. It was found that an amplification factor of as much as 11.1 was achieved. The amplification factor increased as the micro-compliant force amplifier got closer to 0, but it decreased as the crank angle was further from 0.

KW - Compliant

KW - Force amplifier

KW - MEMS

KW - Micromechanism

KW - SOI-MUMPs technology

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U2 - 10.3906/muh-1005-22

DO - 10.3906/muh-1005-22

M3 - Article

AN - SCOPUS:79751494728

SN - 1300-0160

VL - 34

SP - 253

EP - 259

JO - Turkish Journal of Engineering and Environmental Sciences

JF - Turkish Journal of Engineering and Environmental Sciences

IS - 4

ER -

The design and analysis of a novel MEMS force amplifier

Özet

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Belgeye Erişim

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