Residual stresses in (Zr,Hf)N films (up to 11.9 at.% Hf) measured by X-ray diffraction using experimentally calculated XECs

E. Atar; C. Sarioglu; H. Cimenoglu; E. S. Kayali

doi:10.1016/j.surfcoat.2004.02.024

Residual stresses in (Zr,Hf)N films (up to 11.9 at.% Hf) measured by X-ray diffraction using experimentally calculated XECs

E. Atar
, C. Sarioglu
, H. Cimenoglu
, E. S. Kayali^*

^*Bu çalışma için yazışmadan sorumlu yazar

Metalurji ve Malzeme Müh.Böl.

Gebze Technical University
Marmara University
Istanbul Technical University

Araştırma sonucu: Dergiye katkı › Makale › bilirkişi

22 Atıf (Scopus)

Özet

In the present work, the residual stresses of (Zr,Hf)N films were measured using X-ray diffraction (XRD) fixed incident multiplane technique (FIM) for varying amounts of Hf addition by assuming the film was isotropic and anisotropic (Krönel model). The residual stress values calculated according to isotropic and anisotropic models were almost the same (-6 GPa). Addition up to 11.9 at.% Hf into ZrN films did not affect the level of residual stress.

Orijinal dil	İngilizce
Sayfa (başlangıç-bitiş)	188-194
Sayfa sayısı	7
Dergi	Surface and Coatings Technology
Hacim	191
Basın numarası	2-3
DOI'lar	https://doi.org/10.1016/j.surfcoat.2004.02.024
Yayın durumu	Yayınlandı - 21 Şub 2005

Finansman

The authors gratefully acknowledge the support of NATO TU PVD Coatings Project for the equipment supplied to the Metallurgical and Material Engineering Department of Istanbul Technical University, which was utilized in this study.

Finansörler
North Atlantic Treaty Organization
Istanbul Teknik Üniversitesi

Belgeye Erişim

10.1016/j.surfcoat.2004.02.024

Diğer Dosyalar ve Linkler

Link to publication in Scopus

Alıntı Yap

@article{c73718118f7d41ecadc632602fa35f52,

title = "Residual stresses in (Zr,Hf)N films (up to 11.9 at.\% Hf) measured by X-ray diffraction using experimentally calculated XECs",

abstract = "In the present work, the residual stresses of (Zr,Hf)N films were measured using X-ray diffraction (XRD) fixed incident multiplane technique (FIM) for varying amounts of Hf addition by assuming the film was isotropic and anisotropic (Kr{\"o}nel model). The residual stress values calculated according to isotropic and anisotropic models were almost the same (-6 GPa). Addition up to 11.9 at.\% Hf into ZrN films did not affect the level of residual stress.",

keywords = "Coatings, Residual stress, Thin film, X-ray diffraction, ZrN and HfN",

author = "E. Atar and C. Sarioglu and H. Cimenoglu and Kayali, \{E. S.\}",

year = "2005",

month = feb,

day = "21",

doi = "10.1016/j.surfcoat.2004.02.024",

language = "English",

volume = "191",

pages = "188--194",

journal = "Surface and Coatings Technology",

issn = "0257-8972",

number = "2-3",

}

TY - JOUR

T1 - Residual stresses in (Zr,Hf)N films (up to 11.9 at.% Hf) measured by X-ray diffraction using experimentally calculated XECs

AU - Atar, E.

AU - Sarioglu, C.

AU - Cimenoglu, H.

AU - Kayali, E. S.

PY - 2005/2/21

Y1 - 2005/2/21

N2 - In the present work, the residual stresses of (Zr,Hf)N films were measured using X-ray diffraction (XRD) fixed incident multiplane technique (FIM) for varying amounts of Hf addition by assuming the film was isotropic and anisotropic (Krönel model). The residual stress values calculated according to isotropic and anisotropic models were almost the same (-6 GPa). Addition up to 11.9 at.% Hf into ZrN films did not affect the level of residual stress.

AB - In the present work, the residual stresses of (Zr,Hf)N films were measured using X-ray diffraction (XRD) fixed incident multiplane technique (FIM) for varying amounts of Hf addition by assuming the film was isotropic and anisotropic (Krönel model). The residual stress values calculated according to isotropic and anisotropic models were almost the same (-6 GPa). Addition up to 11.9 at.% Hf into ZrN films did not affect the level of residual stress.

KW - Coatings

KW - Residual stress

KW - Thin film

KW - X-ray diffraction

KW - ZrN and HfN

UR - https://www.scopus.com/pages/publications/10944226462

U2 - 10.1016/j.surfcoat.2004.02.024

DO - 10.1016/j.surfcoat.2004.02.024

M3 - Article

AN - SCOPUS:10944226462

SN - 0257-8972

VL - 191

SP - 188

EP - 194

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

IS - 2-3

ER -

Residual stresses in (Zr,Hf)N films (up to 11.9 at.% Hf) measured by X-ray diffraction using experimentally calculated XECs

Özet

Finansman

Belgeye Erişim

Diğer Dosyalar ve Linkler

Parmak izi

Alıntı Yap