Residual stress estimation of ceramic thin films by X-ray diffraction and indentation techniques

Erdem Atar; Cevat Sarioglu; Ugur Demirler; E. Sabri Kayali; Huseyin Cimenoglu

doi:10.1016/S1359-6462(03)00019-8

Residual stress estimation of ceramic thin films by X-ray diffraction and indentation techniques

Erdem Atar
, Cevat Sarioglu
, Ugur Demirler
, E. Sabri Kayali
, Huseyin Cimenoglu^*

^*Bu çalışma için yazışmadan sorumlu yazar

Metalurji ve Malzeme Müh.Böl.

Gebze Technical University
Marmara University
Istanbul Technical University

Araştırma çıktısı: Dergi yayını › Makale › Hakem

57 Atıf (Scopus)

Özet

The residual stresses of CrN, MoN, ZrN and Zr(21%Hf, N) ceramic thin films were examined. Hardness tests were carried out by the instrumentation indendation method. This method is based on the calculation of the difference between the indendation contact areas of stressed and unstressed surfaces by analyzing indendation load-depth data. Residual stresses calculated by this method were found to be three times higher than those of the classical X-ray diffraction method.

Orijinal dil	İngilizce
Sayfa (başlangıç-bitiş)	1331-1336
Sayfa sayısı	6
Dergi	Scripta Materialia
Hacim	48
Basın numarası	9
DOI'lar	https://doi.org/10.1016/S1359-6462(03)00019-8
Yayın durumu	Yayınlandı - May 2003

Finansman

The authors gratefully acknowledge the support of the NATO TU PVD Coatings Project for the equipment supplied to the Metallurgical and Materials Engineering Department of Istanbul Technical University for this study.

Finansörler
North Atlantic Treaty Organization
Istanbul Teknik Üniversitesi

Belgeye Erişim

10.1016/S1359-6462(03)00019-8

Diğer Dosyalar ve Linkler

Link to publication in Scopus

Alıntı Yap

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title = "Residual stress estimation of ceramic thin films by X-ray diffraction and indentation techniques",

abstract = "The residual stresses of CrN, MoN, ZrN and Zr(21\%Hf, N) ceramic thin films were examined. Hardness tests were carried out by the instrumentation indendation method. This method is based on the calculation of the difference between the indendation contact areas of stressed and unstressed surfaces by analyzing indendation load-depth data. Residual stresses calculated by this method were found to be three times higher than those of the classical X-ray diffraction method.",

keywords = "Microindentation, Residual stresses, Thin films, X-ray diffraction",

author = "Erdem Atar and Cevat Sarioglu and Ugur Demirler and \{Sabri Kayali\}, E. and Huseyin Cimenoglu",

year = "2003",

month = may,

doi = "10.1016/S1359-6462(03)00019-8",

language = "English",

volume = "48",

pages = "1331--1336",

journal = "Scripta Materialia",

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TY - JOUR

T1 - Residual stress estimation of ceramic thin films by X-ray diffraction and indentation techniques

AU - Atar, Erdem

AU - Sarioglu, Cevat

AU - Demirler, Ugur

AU - Sabri Kayali, E.

AU - Cimenoglu, Huseyin

PY - 2003/5

Y1 - 2003/5

N2 - The residual stresses of CrN, MoN, ZrN and Zr(21%Hf, N) ceramic thin films were examined. Hardness tests were carried out by the instrumentation indendation method. This method is based on the calculation of the difference between the indendation contact areas of stressed and unstressed surfaces by analyzing indendation load-depth data. Residual stresses calculated by this method were found to be three times higher than those of the classical X-ray diffraction method.

AB - The residual stresses of CrN, MoN, ZrN and Zr(21%Hf, N) ceramic thin films were examined. Hardness tests were carried out by the instrumentation indendation method. This method is based on the calculation of the difference between the indendation contact areas of stressed and unstressed surfaces by analyzing indendation load-depth data. Residual stresses calculated by this method were found to be three times higher than those of the classical X-ray diffraction method.

KW - Microindentation

KW - Residual stresses

KW - Thin films

KW - X-ray diffraction

UR - https://www.scopus.com/pages/publications/0037408598

U2 - 10.1016/S1359-6462(03)00019-8

DO - 10.1016/S1359-6462(03)00019-8

M3 - Article

AN - SCOPUS:0037408598

SN - 1359-6462

VL - 48

SP - 1331

EP - 1336

JO - Scripta Materialia

JF - Scripta Materialia

IS - 9

ER -

Residual stress estimation of ceramic thin films by X-ray diffraction and indentation techniques

Özet

Finansman

Belgeye Erişim

Diğer Dosyalar ve Linkler

Parmak izi

Alıntı Yap