TY - GEN
T1 - Optical and tribological properties of silicon carbide thin films grown by reactive DC magnetron sputtering
AU - Tavsanoglu, Tolga
AU - Baskurt, Erdem
AU - Yucel, Onuralp
PY - 2011
Y1 - 2011
N2 - In this study, SiC films were deposited by reactive DC magnetron sputtering of high purity (99.999%) Si target in Ar/CH4 gas mixture. Three types of substrates, AISI M2 grade high speed steel, glass, and Si (100) were used in each deposition. Films were grown with different compositions at 50 °C and 250 °C by varying (0-50 %) CH4/Ar processing gas ratios. Microstructural properties of SiC films were characterized by cross-sectional FE-SEM (Field-Emission Scanning Electron Microscope) observations. XRD (X-Ray Diffractometer) results indicated that films were amorphous. Friction coefficients as low as 0.1 were obtained from SiC coatings against Al2O3 balls, according to the tribological tests. Optical investigations showed that the transparency and opacity of SiC films could easily be tailored by modifying Si and C concentrations in the coatings.
AB - In this study, SiC films were deposited by reactive DC magnetron sputtering of high purity (99.999%) Si target in Ar/CH4 gas mixture. Three types of substrates, AISI M2 grade high speed steel, glass, and Si (100) were used in each deposition. Films were grown with different compositions at 50 °C and 250 °C by varying (0-50 %) CH4/Ar processing gas ratios. Microstructural properties of SiC films were characterized by cross-sectional FE-SEM (Field-Emission Scanning Electron Microscope) observations. XRD (X-Ray Diffractometer) results indicated that films were amorphous. Friction coefficients as low as 0.1 were obtained from SiC coatings against Al2O3 balls, according to the tribological tests. Optical investigations showed that the transparency and opacity of SiC films could easily be tailored by modifying Si and C concentrations in the coatings.
KW - Optical properties
KW - Reactive DC magnetron sputtering
KW - Silicon carbide
KW - Tribological properties
UR - http://www.scopus.com/inward/record.url?scp=79960691988&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/KEM.484.145
DO - 10.4028/www.scientific.net/KEM.484.145
M3 - Conference contribution
AN - SCOPUS:79960691988
SN - 9783037851814
T3 - Key Engineering Materials
SP - 145
EP - 151
BT - Advanced Engineering Ceramics and Composites
PB - Trans Tech Publications Ltd
ER -