TY - GEN
T1 - MOEMS thermal imaging camera
AU - Fatih Toy, M.
AU - Ferhanoglu, Onur
AU - Torun, Hamdi
AU - Levent Degertekin, F.
AU - Urey, Hakan
PY - 2008
Y1 - 2008
N2 - A novel thermo-mechanical Infrared (IR) imaging array with integrated diffraction gratings for optical readout was fabricated and tested. Parylene was used as a structural material for its low thermal conductivity and high thermal expansion properties. Tests were performed using an IR blackbody target and first order diffracted light was imaged on a CCD camera to monitor the entire array. Results show that it is possible to achieve <100mK NETD using a 12 bit CCD camera.
AB - A novel thermo-mechanical Infrared (IR) imaging array with integrated diffraction gratings for optical readout was fabricated and tested. Parylene was used as a structural material for its low thermal conductivity and high thermal expansion properties. Tests were performed using an IR blackbody target and first order diffracted light was imaged on a CCD camera to monitor the entire array. Results show that it is possible to achieve <100mK NETD using a 12 bit CCD camera.
UR - https://www.scopus.com/pages/publications/51849121067
U2 - 10.1109/RME.2008.4595735
DO - 10.1109/RME.2008.4595735
M3 - Conference contribution
AN - SCOPUS:51849121067
SN - 9781424419838
T3 - PRIME - 2008 PhD Research in Microelectronics and Electronics, Proceedings
SP - 101
EP - 104
BT - PRIME - 2008 PhD Research in Microelectronics and Electronics, Proceedings
T2 - PRIME - 4th Ph.D. Research in Microelectronics and Electronics Conference 2008
Y2 - 22 June 2008 through 25 June 2008
ER -