Microstructure and properties of nitride and diboride hard coatings deposited under intense mild-energy ion bombardment

E. Kelesoglu; C. Mitterer; M. K. Kazmanli; M. Ürgen

doi:10.1016/S0257-8972(99)00198-X

Microstructure and properties of nitride and diboride hard coatings deposited under intense mild-energy ion bombardment

E. Kelesoglu
, C. Mitterer^*
, M. K. Kazmanli
, M. Ürgen

^*Bu çalışma için yazışmadan sorumlu yazar

Metalurji ve Malzeme Müh.Böl.

University of Leoben
Istanbul Technical University

Araştırma çıktısı: Dergi yayını › Konferans makalesi › Hakemli

78 Atıf (Scopus)

Özet

The concept of low or mildly energetic but intense ion bombardment was applied to coatings based on the nitrides and diborides of the transition metals titanium and zirconium. Coatings were deposited using non-reactive unbalanced d.c. magnetron sputtering. Films were bombarded by means of argon ions with varying energy (E(i)) and intensity (ion atom flux ratio J(i)/J(a)). Fracture cross-sections revealed the existence of the transition zone (zone T) structure for all coatings. TiN and ZrN coatings, which are exposed to low energetic bombardment, revealed a preferred growth on (111) lattice planes. Mildly energetic and intense bombardment resulted in a shift of the preferred orientation to (100). TiB₂ and ZrB₂ films grow more or less randomly under low energetic and less intense bombardment. However, they displayed a preferred (001) orientation with increasing intensity of the ion irradiation. The hardness of the coatings increased by the effect of both mildly energetic and intense ton bombardment, mainly as a result of reduced film porosity and to a lesser extent due to reduced crystal size and increasing film stresses.

Orijinal dil	İngilizce
Sayfa (başlangıç-bitiş)	133-140
Sayfa sayısı	8
Dergi	Surface and Coatings Technology
Hacim	116-119
DOI'lar	https://doi.org/10.1016/S0257-8972(99)00198-X
Yayın durumu	Yayınlandı - Eyl 1999
Etkinlik	Proceedings of the 1998 6th International Conference on Plasma Surface Engineering (PSE-98) - Garmisch-Partenkirchen, Ger Süre: 14 Eyl 1998 → 18 Eyl 1998

Finansman

Parts of the work performed at the University of Leoben and Istanbul Technical University were supported by the Bundesministerium für Wissenschaft, Verkehr und Kunst under Contract GZ.49.915, by the Fonds zur Förderung der wissenschaftlichen Forschung (Project P 10764 ÖTE) and NATO SfS TU-PVD Coatings Project, respectively. One of the authors (E.K.) gratefully acknowledges the financial support of Yildiz Technical University, Istanbul (Tr) and the Österreichisches Kulturinstitut, Istanbul (Tr).

Finansörler	Finansör numarası
North Atlantic Treaty Organization
Bundesministerium für Verkehr und Digitale Infrastruktur	GZ.49.915
Austrian Science Fund	P 10764
Yildiz Teknik Üniversitesi
Österreichisches Kulturinstitut

Belgeye Erişim

10.1016/S0257-8972(99)00198-X

Diğer Dosyalar ve Linkler

Link to publication in Scopus

Alıntı Yap

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title = "Microstructure and properties of nitride and diboride hard coatings deposited under intense mild-energy ion bombardment",

abstract = "The concept of low or mildly energetic but intense ion bombardment was applied to coatings based on the nitrides and diborides of the transition metals titanium and zirconium. Coatings were deposited using non-reactive unbalanced d.c. magnetron sputtering. Films were bombarded by means of argon ions with varying energy (E(i)) and intensity (ion atom flux ratio J(i)/J(a)). Fracture cross-sections revealed the existence of the transition zone (zone T) structure for all coatings. TiN and ZrN coatings, which are exposed to low energetic bombardment, revealed a preferred growth on (111) lattice planes. Mildly energetic and intense bombardment resulted in a shift of the preferred orientation to (100). TiB2 and ZrB2 films grow more or less randomly under low energetic and less intense bombardment. However, they displayed a preferred (001) orientation with increasing intensity of the ion irradiation. The hardness of the coatings increased by the effect of both mildly energetic and intense ton bombardment, mainly as a result of reduced film porosity and to a lesser extent due to reduced crystal size and increasing film stresses.",

keywords = "Hardness, Ion bombardment, Microstructure, Titanium diboride, Titanium nitride, Zirconium diboride, Zirconium nitride",

author = "E. Kelesoglu and C. Mitterer and Kazmanli, \{M. K.\} and M. {\"U}rgen",

year = "1999",

month = sep,

doi = "10.1016/S0257-8972(99)00198-X",

language = "English",

volume = "116-119",

pages = "133--140",

journal = "Surface and Coatings Technology",

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note = "Proceedings of the 1998 6th International Conference on Plasma Surface Engineering (PSE-98) ; Conference date: 14-09-1998 Through 18-09-1998",

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TY - JOUR

T1 - Microstructure and properties of nitride and diboride hard coatings deposited under intense mild-energy ion bombardment

AU - Kelesoglu, E.

AU - Mitterer, C.

AU - Kazmanli, M. K.

AU - Ürgen, M.

PY - 1999/9

Y1 - 1999/9

N2 - The concept of low or mildly energetic but intense ion bombardment was applied to coatings based on the nitrides and diborides of the transition metals titanium and zirconium. Coatings were deposited using non-reactive unbalanced d.c. magnetron sputtering. Films were bombarded by means of argon ions with varying energy (E(i)) and intensity (ion atom flux ratio J(i)/J(a)). Fracture cross-sections revealed the existence of the transition zone (zone T) structure for all coatings. TiN and ZrN coatings, which are exposed to low energetic bombardment, revealed a preferred growth on (111) lattice planes. Mildly energetic and intense bombardment resulted in a shift of the preferred orientation to (100). TiB2 and ZrB2 films grow more or less randomly under low energetic and less intense bombardment. However, they displayed a preferred (001) orientation with increasing intensity of the ion irradiation. The hardness of the coatings increased by the effect of both mildly energetic and intense ton bombardment, mainly as a result of reduced film porosity and to a lesser extent due to reduced crystal size and increasing film stresses.

AB - The concept of low or mildly energetic but intense ion bombardment was applied to coatings based on the nitrides and diborides of the transition metals titanium and zirconium. Coatings were deposited using non-reactive unbalanced d.c. magnetron sputtering. Films were bombarded by means of argon ions with varying energy (E(i)) and intensity (ion atom flux ratio J(i)/J(a)). Fracture cross-sections revealed the existence of the transition zone (zone T) structure for all coatings. TiN and ZrN coatings, which are exposed to low energetic bombardment, revealed a preferred growth on (111) lattice planes. Mildly energetic and intense bombardment resulted in a shift of the preferred orientation to (100). TiB2 and ZrB2 films grow more or less randomly under low energetic and less intense bombardment. However, they displayed a preferred (001) orientation with increasing intensity of the ion irradiation. The hardness of the coatings increased by the effect of both mildly energetic and intense ton bombardment, mainly as a result of reduced film porosity and to a lesser extent due to reduced crystal size and increasing film stresses.

KW - Hardness

KW - Ion bombardment

KW - Microstructure

KW - Titanium diboride

KW - Titanium nitride

KW - Zirconium diboride

KW - Zirconium nitride

UR - https://www.scopus.com/pages/publications/0033370806

U2 - 10.1016/S0257-8972(99)00198-X

DO - 10.1016/S0257-8972(99)00198-X

M3 - Conference article

AN - SCOPUS:0033370806

SN - 0257-8972

VL - 116-119

SP - 133

EP - 140

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

T2 - Proceedings of the 1998 6th International Conference on Plasma Surface Engineering (PSE-98)

Y2 - 14 September 1998 through 18 September 1998

ER -

Microstructure and properties of nitride and diboride hard coatings deposited under intense mild-energy ion bombardment

Özet

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