Micro position control of a 3-RRR compliant mechanism

Merve Acer; Asif Şabanoviç

doi:10.1109/ICIT.2013.6505658

Micro position control of a 3-RRR compliant mechanism

Merve Acer
, Asif Şabanoviç

Makina Mühendisliği Bölümü

Istanbul Technical University

Araştırma sonucu: Kitap/Rapor/Konferans Bildirisinde Bölüm › Konferans katkısı › bilirkişi

5 Atıf (Scopus)

Özet

A planar parallel compliant mechanism based on 3-RRR kinematic structure is designed to be used as a micro positioning stage. The position of the center is measured by using a laser position sensor and the mechanism is actuated by piezoelectric actuators. The stage displacements are analyzed by using structural Finite Element Analysis (FEA). However the experimental displacement results for the manufactured mechanism are not compatible with the FEA which means that we have errors due to manufacturing, assembly etc. A position control using Sliding Mode Control with Disturbance Observer is proposed for the reference tracking of the center of the stage. Piezoelectric actuator linear models are used for disturbance rejection. Finally, the position control of the mechanism is succeeded although it has inadmissible errors compared to FEA.

Orijinal dil	İngilizce
Ana bilgisayar yayını başlığı	Proceedings - 2013 IEEE International Conference on Industrial Technology, ICIT 2013
Sayfalar	118-123
Sayfa sayısı	6
DOI'lar	https://doi.org/10.1109/ICIT.2013.6505658
Yayın durumu	Yayınlandı - 2013
Etkinlik	2013 IEEE International Conference on Industrial Technology, ICIT 2013 - Cape Town, South Africa Süre: 25 Şub 2013 → 28 Şub 2013

Yayın serisi

Adı	Proceedings of the IEEE International Conference on Industrial Technology

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???event.eventtypes.event.conference???	2013 IEEE International Conference on Industrial Technology, ICIT 2013
Ülke/Bölge	South Africa
Şehir	Cape Town
Periyot	25/02/13 → 28/02/13

BM SKH

Bu sonuç, aşağıdaki Sürdürülebilir Kalkınma Hedefine/Hedeflerine katkıda bulunur

SKH 9 Sanayi, Yenilikçilik ve Altyapı

Belgeye Erişim

10.1109/ICIT.2013.6505658

Diğer Dosyalar ve Linkler

Link to publication in Scopus

Alıntı Yap

@inproceedings{e1c5f2dbb3174346a43f33f73f207af2,

title = "Micro position control of a 3-RRR compliant mechanism",

abstract = "A planar parallel compliant mechanism based on 3-RRR kinematic structure is designed to be used as a micro positioning stage. The position of the center is measured by using a laser position sensor and the mechanism is actuated by piezoelectric actuators. The stage displacements are analyzed by using structural Finite Element Analysis (FEA). However the experimental displacement results for the manufactured mechanism are not compatible with the FEA which means that we have errors due to manufacturing, assembly etc. A position control using Sliding Mode Control with Disturbance Observer is proposed for the reference tracking of the center of the stage. Piezoelectric actuator linear models are used for disturbance rejection. Finally, the position control of the mechanism is succeeded although it has inadmissible errors compared to FEA.",

keywords = "3-RRR mechanism, compliant mechanism, flexure based mechanism, observer, piezoelectric actuator control, sliding mode control",

author = "Merve Acer and Asif {\c S}abanovi{\c c}",

year = "2013",

doi = "10.1109/ICIT.2013.6505658",

language = "English",

isbn = "9781467345699",

series = "Proceedings of the IEEE International Conference on Industrial Technology",

pages = "118--123",

booktitle = "Proceedings - 2013 IEEE International Conference on Industrial Technology, ICIT 2013",

note = "2013 IEEE International Conference on Industrial Technology, ICIT 2013 ; Conference date: 25-02-2013 Through 28-02-2013",

}

Acer, M & Şabanoviç, A 2013, Micro position control of a 3-RRR compliant mechanism. in Proceedings - 2013 IEEE International Conference on Industrial Technology, ICIT 2013., 6505658, Proceedings of the IEEE International Conference on Industrial Technology, pp. 118-123, 2013 IEEE International Conference on Industrial Technology, ICIT 2013, Cape Town, South Africa, 25/02/13. https://doi.org/10.1109/ICIT.2013.6505658

Micro position control of a 3-RRR compliant mechanism. / Acer, Merve; Şabanoviç, Asif.
Proceedings - 2013 IEEE International Conference on Industrial Technology, ICIT 2013. 2013. p. 118-123 6505658 (Proceedings of the IEEE International Conference on Industrial Technology).

Araştırma sonucu: Kitap/Rapor/Konferans Bildirisinde Bölüm › Konferans katkısı › bilirkişi

TY - GEN

T1 - Micro position control of a 3-RRR compliant mechanism

AU - Acer, Merve

AU - Şabanoviç, Asif

PY - 2013

Y1 - 2013

N2 - A planar parallel compliant mechanism based on 3-RRR kinematic structure is designed to be used as a micro positioning stage. The position of the center is measured by using a laser position sensor and the mechanism is actuated by piezoelectric actuators. The stage displacements are analyzed by using structural Finite Element Analysis (FEA). However the experimental displacement results for the manufactured mechanism are not compatible with the FEA which means that we have errors due to manufacturing, assembly etc. A position control using Sliding Mode Control with Disturbance Observer is proposed for the reference tracking of the center of the stage. Piezoelectric actuator linear models are used for disturbance rejection. Finally, the position control of the mechanism is succeeded although it has inadmissible errors compared to FEA.

AB - A planar parallel compliant mechanism based on 3-RRR kinematic structure is designed to be used as a micro positioning stage. The position of the center is measured by using a laser position sensor and the mechanism is actuated by piezoelectric actuators. The stage displacements are analyzed by using structural Finite Element Analysis (FEA). However the experimental displacement results for the manufactured mechanism are not compatible with the FEA which means that we have errors due to manufacturing, assembly etc. A position control using Sliding Mode Control with Disturbance Observer is proposed for the reference tracking of the center of the stage. Piezoelectric actuator linear models are used for disturbance rejection. Finally, the position control of the mechanism is succeeded although it has inadmissible errors compared to FEA.

KW - 3-RRR mechanism

KW - compliant mechanism

KW - flexure based mechanism

KW - observer

KW - piezoelectric actuator control

KW - sliding mode control

UR - https://www.scopus.com/pages/publications/84877625382

U2 - 10.1109/ICIT.2013.6505658

DO - 10.1109/ICIT.2013.6505658

M3 - Conference contribution

AN - SCOPUS:84877625382

SN - 9781467345699

T3 - Proceedings of the IEEE International Conference on Industrial Technology

SP - 118

EP - 123

BT - Proceedings - 2013 IEEE International Conference on Industrial Technology, ICIT 2013

T2 - 2013 IEEE International Conference on Industrial Technology, ICIT 2013

Y2 - 25 February 2013 through 28 February 2013

ER -

Micro position control of a 3-RRR compliant mechanism

Özet

Yayın serisi

???event.eventtypes.event.conference???

BM SKH

Belgeye Erişim

Diğer Dosyalar ve Linkler

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