MEMS bimaterial IR sensor array with AC-coupled optical readout

Ulas Adiyan; Fehmi Civitci; Onur Ferhanoglu; Hamdi Torun; Hakan Urey

doi:10.1109/OMN.2015.7288834

MEMS bimaterial IR sensor array with AC-coupled optical readout

Ulas Adiyan, Fehmi Civitci, Onur Ferhanoglu, Hamdi Torun, Hakan Urey

Elektronik ve Hab.Müh.Bölümü

Araştırma sonucu: Kitap/Rapor/Konferans Bildirisinde Bölüm › Konferans katkısı › bilirkişi

2 Atıf (Scopus)

Özet

This paper demonstrates a 35-μm pixel pitch MEMS thermal sensor array with optical-readout. We implemented an AC-coupled readout method for a single MEMS pixel using a photodetector, which responds only to changes in the scene. AC-coupled readout substantially reduced the optical noise by eliminating the large DC beam. This method can be scaled to achieve smart pixel cameras for read sensor arrays with low-noise and high dynamic range.

Orijinal dil	İngilizce
Ana bilgisayar yayını başlığı	OMN 2015 Jerusalem - 2015 International Conference on Optical MEMS and Nanophotonics, Proceedings
Yayınlayan	IEEE Computer Society
ISBN (Elektronik)	9781467368346
DOI'lar	https://doi.org/10.1109/OMN.2015.7288834
Yayın durumu	Yayınlandı - 2 Eki 2015
Etkinlik	International Conference on Optical MEMS and Nanophotonics, OMN 2015 - Jerusalem, Israel Süre: 2 Ağu 2015 → 5 Ağu 2015

Yayın serisi

Adı	International Conference on Optical MEMS and Nanophotonics
Hacim	02-05-August-2015
ISSN (Basılı)	2160-5033
ISSN (Elektronik)	2160-5041

???event.eventtypes.event.conference???

???event.eventtypes.event.conference???	International Conference on Optical MEMS and Nanophotonics, OMN 2015
Ülke/Bölge	Israel
Şehir	Jerusalem
Periyot	2/08/15 → 5/08/15

Bibliyografik not

Publisher Copyright:
© 2015 IEEE.

Belgeye Erişim

10.1109/OMN.2015.7288834

Diğer Dosyalar ve Linkler

Link to publication in Scopus

Alıntı Yap

Adiyan, U., Civitci, F., Ferhanoglu, O., Torun, H., & Urey, H. (2015). MEMS bimaterial IR sensor array with AC-coupled optical readout. In OMN 2015 Jerusalem - 2015 International Conference on Optical MEMS and Nanophotonics, Proceedings Makale 7288834 (International Conference on Optical MEMS and Nanophotonics; Hac. 02-05-August-2015). IEEE Computer Society. https://doi.org/10.1109/OMN.2015.7288834

@inproceedings{e534406a9787436e86eae132083c9bd1,

title = "MEMS bimaterial IR sensor array with AC-coupled optical readout",

abstract = "This paper demonstrates a 35-μm pixel pitch MEMS thermal sensor array with optical-readout. We implemented an AC-coupled readout method for a single MEMS pixel using a photodetector, which responds only to changes in the scene. AC-coupled readout substantially reduced the optical noise by eliminating the large DC beam. This method can be scaled to achieve smart pixel cameras for read sensor arrays with low-noise and high dynamic range.",

keywords = "AC coupling, IR Detection, Optical Readout, Thermo-Mechanical MEMS",

author = "Ulas Adiyan and Fehmi Civitci and Onur Ferhanoglu and Hamdi Torun and Hakan Urey",

note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; International Conference on Optical MEMS and Nanophotonics, OMN 2015 ; Conference date: 02-08-2015 Through 05-08-2015",

year = "2015",

month = oct,

day = "2",

doi = "10.1109/OMN.2015.7288834",

language = "English",

series = "International Conference on Optical MEMS and Nanophotonics",

publisher = "IEEE Computer Society",

booktitle = "OMN 2015 Jerusalem - 2015 International Conference on Optical MEMS and Nanophotonics, Proceedings",

address = "United States",

}

Adiyan, U, Civitci, F, Ferhanoglu, O, Torun, H & Urey, H 2015, MEMS bimaterial IR sensor array with AC-coupled optical readout. in OMN 2015 Jerusalem - 2015 International Conference on Optical MEMS and Nanophotonics, Proceedings., 7288834, International Conference on Optical MEMS and Nanophotonics, hac. 02-05-August-2015, IEEE Computer Society, International Conference on Optical MEMS and Nanophotonics, OMN 2015, Jerusalem, Israel, 2/08/15. https://doi.org/10.1109/OMN.2015.7288834

MEMS bimaterial IR sensor array with AC-coupled optical readout. / Adiyan, Ulas; Civitci, Fehmi; Ferhanoglu, Onur et al.
OMN 2015 Jerusalem - 2015 International Conference on Optical MEMS and Nanophotonics, Proceedings. IEEE Computer Society, 2015. 7288834 (International Conference on Optical MEMS and Nanophotonics; Hac. 02-05-August-2015).

Araştırma sonucu: Kitap/Rapor/Konferans Bildirisinde Bölüm › Konferans katkısı › bilirkişi

TY - GEN

T1 - MEMS bimaterial IR sensor array with AC-coupled optical readout

AU - Adiyan, Ulas

AU - Civitci, Fehmi

AU - Ferhanoglu, Onur

AU - Torun, Hamdi

AU - Urey, Hakan

PY - 2015/10/2

Y1 - 2015/10/2

N2 - This paper demonstrates a 35-μm pixel pitch MEMS thermal sensor array with optical-readout. We implemented an AC-coupled readout method for a single MEMS pixel using a photodetector, which responds only to changes in the scene. AC-coupled readout substantially reduced the optical noise by eliminating the large DC beam. This method can be scaled to achieve smart pixel cameras for read sensor arrays with low-noise and high dynamic range.

AB - This paper demonstrates a 35-μm pixel pitch MEMS thermal sensor array with optical-readout. We implemented an AC-coupled readout method for a single MEMS pixel using a photodetector, which responds only to changes in the scene. AC-coupled readout substantially reduced the optical noise by eliminating the large DC beam. This method can be scaled to achieve smart pixel cameras for read sensor arrays with low-noise and high dynamic range.

KW - AC coupling

KW - IR Detection

KW - Optical Readout

KW - Thermo-Mechanical MEMS

UR - http://www.scopus.com/inward/record.url?scp=84958568476&partnerID=8YFLogxK

U2 - 10.1109/OMN.2015.7288834

DO - 10.1109/OMN.2015.7288834

M3 - Conference contribution

AN - SCOPUS:84958568476

T3 - International Conference on Optical MEMS and Nanophotonics

BT - OMN 2015 Jerusalem - 2015 International Conference on Optical MEMS and Nanophotonics, Proceedings

PB - IEEE Computer Society

T2 - International Conference on Optical MEMS and Nanophotonics, OMN 2015

Y2 - 2 August 2015 through 5 August 2015

ER -

MEMS bimaterial IR sensor array with AC-coupled optical readout

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Yayın serisi

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Bibliyografik not

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