Fracture toughness of AlTiN coatings investigated by nanoindentation and microcantilever bending

Burçin Kaygusuz; Amir Motallebzadeh; Özcan Karadayı; Kürşat Kazmanlı; Sezer Özerinç

doi:10.1016/j.tsf.2024.140199

Fracture toughness of AlTiN coatings investigated by nanoindentation and microcantilever bending

Burçin Kaygusuz, Amir Motallebzadeh, Özcan Karadayı, Kürşat Kazmanlı, Sezer Özerinç^*

^*Bu çalışma için yazışmadan sorumlu yazar

Metalurji ve Malzeme Müh.Böl.

Araştırma sonucu: Dergiye katkı › Makale › bilirkişi

1 Atıf (Scopus)

Özet

Metal nitride coatings are increasingly used in MEMS applications. The brittle nature of these coatings makes fracture one of the main failure mechanisms during operation. Therefore, quantifying the fracture toughness of nitride coatings in a reliable fashion is important to understand the failure behavior and to optimize device performance and reliability. This study investigated the fracture toughness of AlTiN coatings produced by cathodic arc evaporation, a widely used technique in the industry. Nanoindentation and microcantilever bending-based measurements indicated a fracture toughness of 6.6 and 4.8 MPa·m^1/2, respectively. The lower toughness results of microcantilever bending were attributed to the columnar growth of the coating, which promoted crack propagation perpendicular to the film surface. The results provide useful data toward a better understanding of the fracture of hard coatings and give insight into the advantages and disadvantages of different measurement methods.

Orijinal dil	İngilizce
Makale numarası	140199
Dergi	Thin Solid Films
Hacim	790
DOI'lar	https://doi.org/10.1016/j.tsf.2024.140199
Yayın durumu	Yayınlandı - 15 Şub 2024

Bibliyografik not

Publisher Copyright:
© 2024 Elsevier B.V.

Finansman

We thank Can Okuyucu for his support in SEM imaging and Hisham Nasser for his support in wet etching of the coated substrates. We thank ODTÜ-GÜNAM, METU Central Laboratory, Koç University KUYTAM, and Bilkent University UNAM facilities for their support in characterization activities. This research was supported by the Scientific and Technological Research Council of Turkey Grant # 118M201 and Council of Higher Education (YÖK) 100/2000 doctoral scholarship. We thank Can Okuyucu for his support in SEM imaging and Hisham Nasser for his support in wet etching of the coated substrates. We thank ODTÜ-GÜNAM, METU Central Laboratory, Koç University KUYTAM, and Bilkent University UNAM facilities for their support in characterization activities. This research was supported by the Scientific and Technological Research Council of Turkey Grant #118M201 and Council of Higher Education (YÖK) 100/2000 doctoral scholarship.

Finansörler	Finansör numarası
METU
ODTÜ-GÜNAM
YÖK
Türkiye Bilimsel ve Teknolojik Araştırma Kurumu	118M201
Yükseköğretim Kurulu

Belgeye Erişim

10.1016/j.tsf.2024.140199

Diğer Dosyalar ve Linkler

Link to publication in Scopus

Alıntı Yap

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title = "Fracture toughness of AlTiN coatings investigated by nanoindentation and microcantilever bending",

abstract = "Metal nitride coatings are increasingly used in MEMS applications. The brittle nature of these coatings makes fracture one of the main failure mechanisms during operation. Therefore, quantifying the fracture toughness of nitride coatings in a reliable fashion is important to understand the failure behavior and to optimize device performance and reliability. This study investigated the fracture toughness of AlTiN coatings produced by cathodic arc evaporation, a widely used technique in the industry. Nanoindentation and microcantilever bending-based measurements indicated a fracture toughness of 6.6 and 4.8 MPa·m1/2, respectively. The lower toughness results of microcantilever bending were attributed to the columnar growth of the coating, which promoted crack propagation perpendicular to the film surface. The results provide useful data toward a better understanding of the fracture of hard coatings and give insight into the advantages and disadvantages of different measurement methods.",

keywords = "Aluminum titanium nitride, Fracture toughness, Hard coating, Microcantilever bending, Micromechanical testing, Nanoindentation, Thin film",

author = "Bur{\c c}in Kaygusuz and Amir Motallebzadeh and {\"O}zcan Karadayı and K{\"u}r{\c s}at Kazmanlı and Sezer {\"O}zerin{\c c}",

note = "Publisher Copyright: {\textcopyright} 2024 Elsevier B.V.",

year = "2024",

month = feb,

day = "15",

doi = "10.1016/j.tsf.2024.140199",

language = "English",

volume = "790",

journal = "Thin Solid Films",

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T1 - Fracture toughness of AlTiN coatings investigated by nanoindentation and microcantilever bending

AU - Kaygusuz, Burçin

AU - Motallebzadeh, Amir

AU - Karadayı, Özcan

AU - Kazmanlı, Kürşat

AU - Özerinç, Sezer

PY - 2024/2/15

Y1 - 2024/2/15

N2 - Metal nitride coatings are increasingly used in MEMS applications. The brittle nature of these coatings makes fracture one of the main failure mechanisms during operation. Therefore, quantifying the fracture toughness of nitride coatings in a reliable fashion is important to understand the failure behavior and to optimize device performance and reliability. This study investigated the fracture toughness of AlTiN coatings produced by cathodic arc evaporation, a widely used technique in the industry. Nanoindentation and microcantilever bending-based measurements indicated a fracture toughness of 6.6 and 4.8 MPa·m1/2, respectively. The lower toughness results of microcantilever bending were attributed to the columnar growth of the coating, which promoted crack propagation perpendicular to the film surface. The results provide useful data toward a better understanding of the fracture of hard coatings and give insight into the advantages and disadvantages of different measurement methods.

AB - Metal nitride coatings are increasingly used in MEMS applications. The brittle nature of these coatings makes fracture one of the main failure mechanisms during operation. Therefore, quantifying the fracture toughness of nitride coatings in a reliable fashion is important to understand the failure behavior and to optimize device performance and reliability. This study investigated the fracture toughness of AlTiN coatings produced by cathodic arc evaporation, a widely used technique in the industry. Nanoindentation and microcantilever bending-based measurements indicated a fracture toughness of 6.6 and 4.8 MPa·m1/2, respectively. The lower toughness results of microcantilever bending were attributed to the columnar growth of the coating, which promoted crack propagation perpendicular to the film surface. The results provide useful data toward a better understanding of the fracture of hard coatings and give insight into the advantages and disadvantages of different measurement methods.

KW - Aluminum titanium nitride

KW - Fracture toughness

KW - Hard coating

KW - Microcantilever bending

KW - Micromechanical testing

KW - Nanoindentation

KW - Thin film

UR - http://www.scopus.com/inward/record.url?scp=85182728580&partnerID=8YFLogxK

U2 - 10.1016/j.tsf.2024.140199

DO - 10.1016/j.tsf.2024.140199

M3 - Article

AN - SCOPUS:85182728580

SN - 0040-6090

VL - 790

JO - Thin Solid Films

JF - Thin Solid Films

M1 - 140199

ER -

Fracture toughness of AlTiN coatings investigated by nanoindentation and microcantilever bending

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