Fiber temperature sensor utilizing a thermomechanical MEMS detector

H. Ozan Çirkinolu; Habib Bilgin; Fehmi Çivitci; Hamdi Torun; Onur Ferhanoglu

doi:10.1117/12.2237134

Fiber temperature sensor utilizing a thermomechanical MEMS detector

H. Ozan Çirkinolu, Habib Bilgin, Fehmi Çivitci, Hamdi Torun, Onur Ferhanoglu

Elektronik ve Hab.Müh.Bölümü

Araştırma sonucu: Kitap/Rapor/Konferans Bildirisinde Bölüm › Konferans katkısı › bilirkişi

Özet

We propose a novel fiber sensor utilizing a thermomechanical MEMS element at the fiber tip. Owing to its Parylene/Titanium bimaterial structure, the MEMS membrane exhibits an out-of plane displacement with changing temperature. Together with the MEMS element, the embedded diffraction grating forms an in-line interferometer, from which the displacement as well as the temperature can be deduced. The fabricated detector is placed at the single-mode fiber output that is collimated via a graded index lens. This novel architecture allows for integrating MEMS detectors on standard optical fibers, and easy substitution of the MEMS detector element to alter the measurement range and the response time of the sensor.Temperature and time-constant measurements are provided and verified with reference measurements, revealing better than 20 mK temperature sensitivity and 2.5 msec response time, using low-cost laser source and photodetectors.

Orijinal dil	İngilizce
Ana bilgisayar yayını başlığı	Photonic Fiber and Crystal Devices
Ana bilgisayar yayını alt yazısı	Advances in Materials and Innovations in Device Applications X
Editörler	Ruyan Guo, Shizhuo Yin
Yayınlayan	SPIE
ISBN (Elektronik)	9781510603073
DOI'lar	https://doi.org/10.1117/12.2237134
Yayın durumu	Yayınlandı - 2016
Etkinlik	Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications X - San Diego, United States Süre: 28 Ağu 2016 → 29 Ağu 2016

Yayın serisi

Adı	Proceedings of SPIE - The International Society for Optical Engineering
Hacim	9958
ISSN (Basılı)	0277-786X
ISSN (Elektronik)	1996-756X

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???event.eventtypes.event.conference???	Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications X
Ülke/Bölge	United States
Şehir	San Diego
Periyot	28/08/16 → 29/08/16

Bibliyografik not

Publisher Copyright:
© 2016 SPIE.

Belgeye Erişim

10.1117/12.2237134

Diğer Dosyalar ve Linkler

Link to publication in Scopus

Alıntı Yap

Çirkinolu, H. O., Bilgin, H., Çivitci, F., Torun, H., & Ferhanoglu, O. (2016). Fiber temperature sensor utilizing a thermomechanical MEMS detector. In R. Guo, & S. Yin (Eds.), Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications X Makale 995813 (Proceedings of SPIE - The International Society for Optical Engineering; Hac. 9958). SPIE. https://doi.org/10.1117/12.2237134

@inproceedings{33904974e39a4f7b8292469f173c1d47,

title = "Fiber temperature sensor utilizing a thermomechanical MEMS detector",

abstract = "We propose a novel fiber sensor utilizing a thermomechanical MEMS element at the fiber tip. Owing to its Parylene/Titanium bimaterial structure, the MEMS membrane exhibits an out-of plane displacement with changing temperature. Together with the MEMS element, the embedded diffraction grating forms an in-line interferometer, from which the displacement as well as the temperature can be deduced. The fabricated detector is placed at the single-mode fiber output that is collimated via a graded index lens. This novel architecture allows for integrating MEMS detectors on standard optical fibers, and easy substitution of the MEMS detector element to alter the measurement range and the response time of the sensor.Temperature and time-constant measurements are provided and verified with reference measurements, revealing better than 20 mK temperature sensitivity and 2.5 msec response time, using low-cost laser source and photodetectors.",

keywords = "Microelectomechanical devices, Optical device fabrication, Optical fiber applications, Temperature measurement",

author = "{\c C}irkinolu, {H. Ozan} and Habib Bilgin and Fehmi {\c C}ivitci and Hamdi Torun and Onur Ferhanoglu",

note = "Publisher Copyright: {\textcopyright} 2016 SPIE.; Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications X ; Conference date: 28-08-2016 Through 29-08-2016",

year = "2016",

doi = "10.1117/12.2237134",

language = "English",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

publisher = "SPIE",

editor = "Ruyan Guo and Shizhuo Yin",

booktitle = "Photonic Fiber and Crystal Devices",

address = "United States",

}

Çirkinolu, HO, Bilgin, H, Çivitci, F, Torun, H & Ferhanoglu, O 2016, Fiber temperature sensor utilizing a thermomechanical MEMS detector. in R Guo & S Yin (eds), Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications X., 995813, Proceedings of SPIE - The International Society for Optical Engineering, hac. 9958, SPIE, Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications X, San Diego, United States, 28/08/16. https://doi.org/10.1117/12.2237134

Fiber temperature sensor utilizing a thermomechanical MEMS detector. / Çirkinolu, H. Ozan; Bilgin, Habib; Çivitci, Fehmi et al.
Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications X. ed. / Ruyan Guo; Shizhuo Yin. SPIE, 2016. 995813 (Proceedings of SPIE - The International Society for Optical Engineering; Hac. 9958).

Araştırma sonucu: Kitap/Rapor/Konferans Bildirisinde Bölüm › Konferans katkısı › bilirkişi

TY - GEN

T1 - Fiber temperature sensor utilizing a thermomechanical MEMS detector

AU - Çirkinolu, H. Ozan

AU - Bilgin, Habib

AU - Çivitci, Fehmi

AU - Torun, Hamdi

AU - Ferhanoglu, Onur

PY - 2016

Y1 - 2016

N2 - We propose a novel fiber sensor utilizing a thermomechanical MEMS element at the fiber tip. Owing to its Parylene/Titanium bimaterial structure, the MEMS membrane exhibits an out-of plane displacement with changing temperature. Together with the MEMS element, the embedded diffraction grating forms an in-line interferometer, from which the displacement as well as the temperature can be deduced. The fabricated detector is placed at the single-mode fiber output that is collimated via a graded index lens. This novel architecture allows for integrating MEMS detectors on standard optical fibers, and easy substitution of the MEMS detector element to alter the measurement range and the response time of the sensor.Temperature and time-constant measurements are provided and verified with reference measurements, revealing better than 20 mK temperature sensitivity and 2.5 msec response time, using low-cost laser source and photodetectors.

AB - We propose a novel fiber sensor utilizing a thermomechanical MEMS element at the fiber tip. Owing to its Parylene/Titanium bimaterial structure, the MEMS membrane exhibits an out-of plane displacement with changing temperature. Together with the MEMS element, the embedded diffraction grating forms an in-line interferometer, from which the displacement as well as the temperature can be deduced. The fabricated detector is placed at the single-mode fiber output that is collimated via a graded index lens. This novel architecture allows for integrating MEMS detectors on standard optical fibers, and easy substitution of the MEMS detector element to alter the measurement range and the response time of the sensor.Temperature and time-constant measurements are provided and verified with reference measurements, revealing better than 20 mK temperature sensitivity and 2.5 msec response time, using low-cost laser source and photodetectors.

KW - Microelectomechanical devices

KW - Optical device fabrication

KW - Optical fiber applications

KW - Temperature measurement

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U2 - 10.1117/12.2237134

DO - 10.1117/12.2237134

M3 - Conference contribution

AN - SCOPUS:85008479940

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Photonic Fiber and Crystal Devices

A2 - Guo, Ruyan

A2 - Yin, Shizhuo

PB - SPIE

T2 - Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications X

Y2 - 28 August 2016 through 29 August 2016

ER -

Çirkinolu HO, Bilgin H, Çivitci F, Torun H, Ferhanoglu O. Fiber temperature sensor utilizing a thermomechanical MEMS detector. In Guo R, Yin S, editörler, Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications X. SPIE. 2016. 995813. (Proceedings of SPIE - The International Society for Optical Engineering). doi: 10.1117/12.2237134

Fiber temperature sensor utilizing a thermomechanical MEMS detector

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