Dynamic behaviour of a novel compliant mems force amplifier by matlab/simulink

In last decades, compliant amplifiers are significant in enabling high output forces for themicro actuators and due to its monolithicstructure; it is well suited for MEMS applications. In this study, the dynamic approach of novel compliant mems force amplifier is tried to beevaluated by modeling its rigid body mechanism by matlab/simulink. Kinematic analysis is able to be obtained by velocity and acceleration model in simulink. Dynamic response of memsamplifier is validated at ramp input function and it is claimed that the output force goes to infinity at zero-crank angle. Only small crank rotationat about 2.3° gives approximately 2650 timesforce amplification.