Özet
We propose a microsystem integration technique that is ideal for low-cost fabrication of vibration energy harvesting sensor nodes. Our approach exploits diverse uses of sol-gel deposited lead zirconate titanate, effectively combining fabrication of several microsystem components into a single process and significantly reducing manufacturing cost and time. Here, we measure and characterize thin film parameters - such as the piezoelectric coefficient e 31 (-4.0 C/m2), the dielectric constant ε( r-eff (219 at 3.3 V), and the total switching polarization (2P r;52 μC/cm2) - in order to verify this material's potential for energy harvesting, energy storage, and nonvolatile memory applications simultaneously on the same device.
| Orijinal dil | İngilizce |
|---|---|
| Makale numarası | 014904 |
| Dergi | Journal of Applied Physics |
| Hacim | 109 |
| Basın numarası | 1 |
| DOI'lar | |
| Yayın durumu | Yayınlandı - 1 Oca 2011 |
| Harici olarak yayınlandı | Evet |
Finansman
This work was supported by the National Science Foundation Grant No. ECCS-0601630 and the Office of Naval Research Grant No. N00014-09-01-0197. We also thank Jason Hoffman for technical help in XRD data acquisition.
| Finansörler | Finansör numarası |
|---|---|
| National Science Foundation | ECCS-0601630 |
| Office of Naval Research | N00014-09-01-0197 |
BM SKH
Bu sonuç, aşağıdaki Sürdürülebilir Kalkınma Hedefine/Hedeflerine katkıda bulunur
-
SKH 9 Sanayi, Yenilikçilik ve Altyapı
Parmak izi
Characterization of ferroelectric material properties of multifunctional lead zirconate titanate for energy harvesting sensor nodes' araştırma başlıklarına git. Birlikte benzersiz bir parmak izi oluştururlar.Alıntı Yap
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