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Characterization of ferroelectric material properties of multifunctional lead zirconate titanate for energy harvesting sensor nodes

  • Bozidar Marinkovic
  • , Tolga Kaya
  • , Hur Koser*
  • *Bu çalışma için yazışmadan sorumlu yazar
  • Yale University
  • Central Michigan University

Araştırma sonucu: Dergiye katkıMakalebilirkişi

11 Atıf (Scopus)

Özet

We propose a microsystem integration technique that is ideal for low-cost fabrication of vibration energy harvesting sensor nodes. Our approach exploits diverse uses of sol-gel deposited lead zirconate titanate, effectively combining fabrication of several microsystem components into a single process and significantly reducing manufacturing cost and time. Here, we measure and characterize thin film parameters - such as the piezoelectric coefficient e 31 (-4.0 C/m2), the dielectric constant ε( r-eff (219 at 3.3 V), and the total switching polarization (2P r;52 μC/cm2) - in order to verify this material's potential for energy harvesting, energy storage, and nonvolatile memory applications simultaneously on the same device.

Orijinal dilİngilizce
Makale numarası014904
DergiJournal of Applied Physics
Hacim109
Basın numarası1
DOI'lar
Yayın durumuYayınlandı - 1 Oca 2011
Harici olarak yayınlandıEvet

Finansman

This work was supported by the National Science Foundation Grant No. ECCS-0601630 and the Office of Naval Research Grant No. N00014-09-01-0197. We also thank Jason Hoffman for technical help in XRD data acquisition.

FinansörlerFinansör numarası
National Science FoundationECCS-0601630
Office of Naval ResearchN00014-09-01-0197

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