A Prism-Based Optical Readout Method for MEMS Bimaterial Infrared Sensors

Ulas Adiyan, Fehmi Civitci, Onur Ferhanoglu, Hamdi Torun, Hakan Urey

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1 Atıf (Scopus)

Özet

This letter demonstrates a novel prism-based optical-readout, which uses a single prism to detect the incoming TM polarized wave just below the critical angle. The method is used with a 35-μm-pixel pitch MEMS thermal sensor, whose inclination angle changes with the absorbed infrared (IR) radiation that results in an increase in the reflectivity at the prism's glass-air interface. We compared this approach with the conventional knife-edge method. Noise equivalent temperature difference for a single sensor was measured as 200 mK for knife-edge method, and 154 mK for the proposed critical angle approach. Our approach shows a significant improvement for the sensitivity of the IR sensor. Both methods utilize an AC-coupled readout method for a single MEMS pixel using a photodetector, which responds only to changes in the scene. This method can be scaled to achieve smart pixel cameras for read sensor arrays with low-noise and high-dynamic range.

Orijinal dilİngilizce
Makale numarası7480838
Sayfa (başlangıç-bitiş)1866-1869
Sayfa sayısı4
DergiIEEE Photonics Technology Letters
Hacim28
Basın numarası17
DOI'lar
Yayın durumuYayınlandı - 1 Eyl 2016

Bibliyografik not

Publisher Copyright:
© 1989-2012 IEEE.

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