A chattering-free sliding mode controller for MEM comb drives for increased reliability and robustness

In this study, a chattering free sliding mode controller (SMC) is designed for the control of MEM comb drives. Due to the highly nonlinear structure of the electrostatic comb drive, a robust nonlinear control approach is demonstrated to be more suitable for the control of such systems over linear control methods, particularly when considering issues of durability, reliability and robustness. Simulation results are obtained under parameter variations imposed on the system with both the proposed controller and PID controller and it has been concluded that significant improvement can be achieved in the reliability and robustness of MEM comb drives using the developed SMC.