Uncooled infrared thermo-mechanical detector array: Design, fabrication and testing

M. Fatih Toy; Onur Ferhanoglu; Hamdi Torun; Hakan Urey

doi:10.1016/j.sna.2009.02.010

Uncooled infrared thermo-mechanical detector array: Design, fabrication and testing

M. Fatih Toy, Onur Ferhanoglu^*, Hamdi Torun, Hakan Urey

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

34 Citations (Scopus)

Abstract

Thermo-mechanical detector arrays in the 160 × 120 array format are designed, fabricated, and tested. Detectors are composed of SiN_x and TiN as absorbing layer, Al to form bimaterial legs, and integrated diffraction grating interferometer underneath each detector. The detector array is a passive component and the optical readout is performed remotely with a laser and CCD camera. All noise sources are considered in making a detailed noise equivalent temperature difference (NETD) estimation, which revealed <30 mK NETD is achievable using >12-bit CCD camera for the readout.

Original language	English
Pages (from-to)	88-94
Number of pages	7
Journal	Sensors and Actuators A: Physical
Volume	156
Issue number	1
DOIs	https://doi.org/10.1016/j.sna.2009.02.010
Publication status	Published - Nov 2009
Externally published	Yes

Funding

This work is sponsored by Aselsan Inc. (Turkey). We are grateful to Prof. Tayfun Akın and Orhan Akar from Middle East Technical University Microelectronics Center: METU-MET for fabrication of the arrays and VTT/Finland for providing vacuum packages. O.F. and M.F.T. acknowledges the support from TUBİTAK scholarship for graduate studies and H.U. acknowledges the support from TÜBA-GEBİP Distinguished Young Scientist award.

Funders	Funder number
TUBİTAK
TÜBA-GEBİP
Aselsan

Keywords

CCD camera
Diffraction grating
NETD
Optical readout
Thermal detector

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10.1016/j.sna.2009.02.010

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abstract = "Thermo-mechanical detector arrays in the 160 × 120 array format are designed, fabricated, and tested. Detectors are composed of SiNx and TiN as absorbing layer, Al to form bimaterial legs, and integrated diffraction grating interferometer underneath each detector. The detector array is a passive component and the optical readout is performed remotely with a laser and CCD camera. All noise sources are considered in making a detailed noise equivalent temperature difference (NETD) estimation, which revealed <30 mK NETD is achievable using >12-bit CCD camera for the readout.",

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author = "Toy, {M. Fatih} and Onur Ferhanoglu and Hamdi Torun and Hakan Urey",

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doi = "10.1016/j.sna.2009.02.010",

language = "English",

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AU - Torun, Hamdi

AU - Urey, Hakan

PY - 2009/11

Y1 - 2009/11

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AB - Thermo-mechanical detector arrays in the 160 × 120 array format are designed, fabricated, and tested. Detectors are composed of SiNx and TiN as absorbing layer, Al to form bimaterial legs, and integrated diffraction grating interferometer underneath each detector. The detector array is a passive component and the optical readout is performed remotely with a laser and CCD camera. All noise sources are considered in making a detailed noise equivalent temperature difference (NETD) estimation, which revealed <30 mK NETD is achievable using >12-bit CCD camera for the readout.

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KW - Diffraction grating

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KW - Thermal detector

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Uncooled infrared thermo-mechanical detector array: Design, fabrication and testing

Abstract

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Keywords

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