Abstract
Diffraction gratings integrated with micro-electro- mechanical-systems (MEMS) offer shot noise limited sub-nanometer displacement detection sensitivities but are limited in detection range for mechanical transducers. A two-wavelength readout method is developed that maintains high sensitivity while increasing the detection range, which is demonstrated using a MEMS spectrometer with integrated diffraction grating. The two-laser illumination extended the detection range from 105 nm to 1.7 μm assuming the readout sensitivity is maintained at >50% of the maximum sensitivity.
| Original language | English |
|---|---|
| Pages (from-to) | 1895-1897 |
| Number of pages | 3 |
| Journal | IEEE Photonics Technology Letters |
| Volume | 19 |
| Issue number | 23 |
| DOIs | |
| Publication status | Published - 1 Dec 2007 |
| Externally published | Yes |
Funding
Manuscript received July 19, 2007; revised August 29, 2007. This work was supported in part by ASELSAN Inc. The authors are with the Electrical Engineering Department, Koc University, Sariyer TR-34450, Istanbul, Turkey (e-mail: [email protected]; mtoy@ku. edu.tr; [email protected]). Digital Object Identifier 10.1109/LPT.2007.908450 Fig 1. (a) Side view of the setup with fixed grating and the moving platform for gap modulation. (b) MEMS IR spectrometer where alternating fingers of the grating are movable.
| Funders | Funder number |
|---|---|
| Aselsan |
Keywords
- Grating interferometry
- Gratings
- Micro-electro-mechanical-(MEMS)
- Microelectromechanical systems
- Optical interferometry
- Optical sensing
- Optical sensors
- Semiconductor lasers
- Sensitivity
- Two-wavelength interferometry