Two-wavelength grating interferometry for MEMS sensors

Onur Ferhanoglu; M. Fatih Toy; Hakan Urey

doi:10.1109/LPT.2007.908450

Two-wavelength grating interferometry for MEMS sensors

Onur Ferhanoglu^*, M. Fatih Toy, Hakan Urey

^*Corresponding author for this work

Koc University

Research output: Contribution to journal › Article › peer-review

27 Citations (Scopus)

Abstract

Diffraction gratings integrated with micro-electro- mechanical-systems (MEMS) offer shot noise limited sub-nanometer displacement detection sensitivities but are limited in detection range for mechanical transducers. A two-wavelength readout method is developed that maintains high sensitivity while increasing the detection range, which is demonstrated using a MEMS spectrometer with integrated diffraction grating. The two-laser illumination extended the detection range from 105 nm to 1.7 μm assuming the readout sensitivity is maintained at >50% of the maximum sensitivity.

Original language	English
Pages (from-to)	1895-1897
Number of pages	3
Journal	IEEE Photonics Technology Letters
Volume	19
Issue number	23
DOIs	https://doi.org/10.1109/LPT.2007.908450
Publication status	Published - 1 Dec 2007
Externally published	Yes

Keywords

Grating interferometry
Gratings
Micro-electro-mechanical-(MEMS)
Microelectromechanical systems
Optical interferometry
Optical sensing
Optical sensors
Semiconductor lasers
Sensitivity
Two-wavelength interferometry

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10.1109/LPT.2007.908450

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@article{62d0517e47614978a2757e1a9ebd575f,

title = "Two-wavelength grating interferometry for MEMS sensors",

abstract = "Diffraction gratings integrated with micro-electro- mechanical-systems (MEMS) offer shot noise limited sub-nanometer displacement detection sensitivities but are limited in detection range for mechanical transducers. A two-wavelength readout method is developed that maintains high sensitivity while increasing the detection range, which is demonstrated using a MEMS spectrometer with integrated diffraction grating. The two-laser illumination extended the detection range from 105 nm to 1.7 μm assuming the readout sensitivity is maintained at >50% of the maximum sensitivity.",

keywords = "Grating interferometry, Gratings, Micro-electro-mechanical-(MEMS), Microelectromechanical systems, Optical interferometry, Optical sensing, Optical sensors, Semiconductor lasers, Sensitivity, Two-wavelength interferometry",

author = "Onur Ferhanoglu and Toy, {M. Fatih} and Hakan Urey",

year = "2007",

month = dec,

day = "1",

doi = "10.1109/LPT.2007.908450",

language = "English",

volume = "19",

pages = "1895--1897",

journal = "IEEE Photonics Technology Letters",

issn = "1041-1135",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "23",

}

TY - JOUR

T1 - Two-wavelength grating interferometry for MEMS sensors

AU - Ferhanoglu, Onur

AU - Toy, M. Fatih

AU - Urey, Hakan

PY - 2007/12/1

Y1 - 2007/12/1

N2 - Diffraction gratings integrated with micro-electro- mechanical-systems (MEMS) offer shot noise limited sub-nanometer displacement detection sensitivities but are limited in detection range for mechanical transducers. A two-wavelength readout method is developed that maintains high sensitivity while increasing the detection range, which is demonstrated using a MEMS spectrometer with integrated diffraction grating. The two-laser illumination extended the detection range from 105 nm to 1.7 μm assuming the readout sensitivity is maintained at >50% of the maximum sensitivity.

AB - Diffraction gratings integrated with micro-electro- mechanical-systems (MEMS) offer shot noise limited sub-nanometer displacement detection sensitivities but are limited in detection range for mechanical transducers. A two-wavelength readout method is developed that maintains high sensitivity while increasing the detection range, which is demonstrated using a MEMS spectrometer with integrated diffraction grating. The two-laser illumination extended the detection range from 105 nm to 1.7 μm assuming the readout sensitivity is maintained at >50% of the maximum sensitivity.

KW - Grating interferometry

KW - Gratings

KW - Micro-electro-mechanical-(MEMS)

KW - Microelectromechanical systems

KW - Optical interferometry

KW - Optical sensing

KW - Optical sensors

KW - Semiconductor lasers

KW - Sensitivity

KW - Two-wavelength interferometry

UR - http://www.scopus.com/inward/record.url?scp=38049125816&partnerID=8YFLogxK

U2 - 10.1109/LPT.2007.908450

DO - 10.1109/LPT.2007.908450

M3 - Article

AN - SCOPUS:38049125816

SN - 1041-1135

VL - 19

SP - 1895

EP - 1897

JO - IEEE Photonics Technology Letters

JF - IEEE Photonics Technology Letters

IS - 23

ER -

Two-wavelength grating interferometry for MEMS sensors

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Keywords

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