Two-wavelength grating interferometry for extended range MEMS metrology

M. F. Toy; O. Ferhanoglu; H. Urey

doi:10.1109/OMEMS.2007.4373857

Two-wavelength grating interferometry for extended range MEMS metrology

M. F. Toy, O. Ferhanoglu, H. Urey

Koc University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Diffraction gratings integrated with MEMS has many applications as they can offer shot noise limited sub-nm displacement detection sensitivities but are limited in range. A two-wavelength readout method is developed that maintains high sensitivity while increasing the detection range from 105nm to 1.7um assuming sensitivity is maintained at >50% of the maximum sensitivity.

Original language	English
Title of host publication	2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS
Pages	95-96
Number of pages	2
DOIs	https://doi.org/10.1109/OMEMS.2007.4373857
Publication status	Published - 2007
Externally published	Yes
Event	2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS - Hualien, Taiwan, Province of China Duration: 12 Aug 2007 → 16 Aug 2007

Publication series

Name	2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS

Conference

Conference	2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS
Country/Territory	Taiwan, Province of China
City	Hualien
Period	12/08/07 → 16/08/07

Keywords

Grating interferometry
MEMS metrology
Optical sensing

Access to Document

10.1109/OMEMS.2007.4373857

Cite this

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title = "Two-wavelength grating interferometry for extended range MEMS metrology",

abstract = "Diffraction gratings integrated with MEMS has many applications as they can offer shot noise limited sub-nm displacement detection sensitivities but are limited in range. A two-wavelength readout method is developed that maintains high sensitivity while increasing the detection range from 105nm to 1.7um assuming sensitivity is maintained at >50% of the maximum sensitivity.",

keywords = "Grating interferometry, MEMS metrology, Optical sensing",

author = "Toy, {M. F.} and O. Ferhanoglu and H. Urey",

year = "2007",

doi = "10.1109/OMEMS.2007.4373857",

language = "English",

isbn = "1424406412",

series = "2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS",

pages = "95--96",

booktitle = "2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS",

note = "2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS ; Conference date: 12-08-2007 Through 16-08-2007",

}

Toy, MF, Ferhanoglu, O & Urey, H 2007, Two-wavelength grating interferometry for extended range MEMS metrology. in 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS., 4373857, 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS, pp. 95-96, 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS, Hualien, Taiwan, Province of China, 12/08/07. https://doi.org/10.1109/OMEMS.2007.4373857

Two-wavelength grating interferometry for extended range MEMS metrology. / Toy, M. F.; Ferhanoglu, O.; Urey, H.
2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS. 2007. p. 95-96 4373857 (2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

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AU - Ferhanoglu, O.

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AB - Diffraction gratings integrated with MEMS has many applications as they can offer shot noise limited sub-nm displacement detection sensitivities but are limited in range. A two-wavelength readout method is developed that maintains high sensitivity while increasing the detection range from 105nm to 1.7um assuming sensitivity is maintained at >50% of the maximum sensitivity.

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ER -

Two-wavelength grating interferometry for extended range MEMS metrology

Abstract

Publication series

Conference

Keywords

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