@inproceedings{ecded6a712e349b4a092fd558f3999b3,
title = "Thermo-mechanical detector array with optical readout",
abstract = "An uncooled thermal detector array with low NETD is designed and fabricated using MEMS bimaterial structures that bend in response to thermal change. A diffraction grating placed underneath each pixel allows sensing sub-nm mechanical deflections.",
author = "H. Torun and O. Ferhanoglu and H. Urey",
year = "2006",
doi = "10.1109/omems.2006.1708290",
language = "English",
isbn = "078039562X",
series = "IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006",
publisher = "IEEE Computer Society",
pages = "112--113",
booktitle = "IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006",
address = "United States",
note = "IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 ; Conference date: 21-08-2006 Through 24-08-2006",
}