The effect of the sputter cleaning of steel substrates with neutral molecule source on the adhesion of TiN films

O. L. Eryilmaz; M. Ürgen; A. F. Çakir; M. K. Kazmanli; U. H. Kahraman

doi:10.1016/S0257-8972(97)00189-8

The effect of the sputter cleaning of steel substrates with neutral molecule source on the adhesion of TiN films

O. L. Eryilmaz^*, M. Ürgen, A. F. Çakir, M. K. Kazmanli, U. H. Kahraman

^*Corresponding author for this work

Department of Metallurgical and Materials Engineering

Istanbul Technical University

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Abstract

The effect of sputtering the surface of a high-speed steel substrate with a neutral molecule source, after alkaline cleaning and boiling water dip-drying, on the adhesion of Arc-PVD TiN coatings was studied. For comparison, the effects of several drying techniques on the adhesion of TiN coatings were also investigated. These samples were all similarly cleaned in alkali but were dried with different techniques such as boiling water dipping, alcohol and hot trichloroethylene dipping. Before coating all the samples were heated and sputter-cleaned with Ti ions. Coatings were all 1.6-1.9 μm thick with hardnesses varying between 34 and 37 kN mm^-2. Adhesion was tested with a scratch tester. Surfaces sputtered with neutral molecules exhibited much higher adhesion than surfaces dried with other techniques and cleaned by Ti ions.

Original language	English
Pages (from-to)	488-491
Number of pages	4
Journal	Surface and Coatings Technology
Volume	97
Issue number	1-3
DOIs	https://doi.org/10.1016/S0257-8972(97)00189-8
Publication status	Published - Dec 1997

Keywords

Adhesion
Neutral molecule source
TiN coatings

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10.1016/S0257-8972(97)00189-8

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@article{17aee2a5e42243a6a5c8d84af870b404,

title = "The effect of the sputter cleaning of steel substrates with neutral molecule source on the adhesion of TiN films",

abstract = "The effect of sputtering the surface of a high-speed steel substrate with a neutral molecule source, after alkaline cleaning and boiling water dip-drying, on the adhesion of Arc-PVD TiN coatings was studied. For comparison, the effects of several drying techniques on the adhesion of TiN coatings were also investigated. These samples were all similarly cleaned in alkali but were dried with different techniques such as boiling water dipping, alcohol and hot trichloroethylene dipping. Before coating all the samples were heated and sputter-cleaned with Ti ions. Coatings were all 1.6-1.9 μm thick with hardnesses varying between 34 and 37 kN mm-2. Adhesion was tested with a scratch tester. Surfaces sputtered with neutral molecules exhibited much higher adhesion than surfaces dried with other techniques and cleaned by Ti ions.",

keywords = "Adhesion, Neutral molecule source, TiN coatings",

author = "Eryilmaz, {O. L.} and M. {\"U}rgen and {\c C}akir, {A. F.} and Kazmanli, {M. K.} and Kahraman, {U. H.}",

year = "1997",

month = dec,

doi = "10.1016/S0257-8972(97)00189-8",

language = "English",

volume = "97",

pages = "488--491",

journal = "Surface and Coatings Technology",

issn = "0257-8972",

publisher = "Elsevier B.V.",

number = "1-3",

}

TY - JOUR

T1 - The effect of the sputter cleaning of steel substrates with neutral molecule source on the adhesion of TiN films

AU - Eryilmaz, O. L.

AU - Ürgen, M.

AU - Çakir, A. F.

AU - Kazmanli, M. K.

AU - Kahraman, U. H.

PY - 1997/12

Y1 - 1997/12

N2 - The effect of sputtering the surface of a high-speed steel substrate with a neutral molecule source, after alkaline cleaning and boiling water dip-drying, on the adhesion of Arc-PVD TiN coatings was studied. For comparison, the effects of several drying techniques on the adhesion of TiN coatings were also investigated. These samples were all similarly cleaned in alkali but were dried with different techniques such as boiling water dipping, alcohol and hot trichloroethylene dipping. Before coating all the samples were heated and sputter-cleaned with Ti ions. Coatings were all 1.6-1.9 μm thick with hardnesses varying between 34 and 37 kN mm-2. Adhesion was tested with a scratch tester. Surfaces sputtered with neutral molecules exhibited much higher adhesion than surfaces dried with other techniques and cleaned by Ti ions.

AB - The effect of sputtering the surface of a high-speed steel substrate with a neutral molecule source, after alkaline cleaning and boiling water dip-drying, on the adhesion of Arc-PVD TiN coatings was studied. For comparison, the effects of several drying techniques on the adhesion of TiN coatings were also investigated. These samples were all similarly cleaned in alkali but were dried with different techniques such as boiling water dipping, alcohol and hot trichloroethylene dipping. Before coating all the samples were heated and sputter-cleaned with Ti ions. Coatings were all 1.6-1.9 μm thick with hardnesses varying between 34 and 37 kN mm-2. Adhesion was tested with a scratch tester. Surfaces sputtered with neutral molecules exhibited much higher adhesion than surfaces dried with other techniques and cleaned by Ti ions.

KW - Adhesion

KW - Neutral molecule source

KW - TiN coatings

UR - http://www.scopus.com/inward/record.url?scp=0031369876&partnerID=8YFLogxK

U2 - 10.1016/S0257-8972(97)00189-8

DO - 10.1016/S0257-8972(97)00189-8

M3 - Article

AN - SCOPUS:0031369876

SN - 0257-8972

VL - 97

SP - 488

EP - 491

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

IS - 1-3

ER -

The effect of the sputter cleaning of steel substrates with neutral molecule source on the adhesion of TiN films

Abstract

Keywords

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