Abstract
Compliant micromechanisms achieve high amplification of forces that can be used as a cutting force in micro- and nanofabrication. In the present study, we designed, simulated, and optimized a novel, simple micro-compliant system by SOI-MUMPs technology. The position and quasi-static analysis of a rigid body model were derived by MATLAB and simulated in ANSYS. It was found that an amplification factor of as much as 11.1 was achieved. The amplification factor increased as the micro-compliant force amplifier got closer to 0, but it decreased as the crank angle was further from 0.
| Original language | English |
|---|---|
| Pages (from-to) | 253-259 |
| Number of pages | 7 |
| Journal | Turkish Journal of Engineering and Environmental Sciences |
| Volume | 34 |
| Issue number | 4 |
| DOIs | |
| Publication status | Published - 2010 |
UN SDGs
This output contributes to the following UN Sustainable Development Goals (SDGs)
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SDG 9 Industry, Innovation, and Infrastructure
Keywords
- Compliant
- Force amplifier
- MEMS
- Micromechanism
- SOI-MUMPs technology
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