The design and analysis of a novel MEMS force amplifier

Ergin Kosa; Ümit Sonmez; Hüseyin Kizil; Levent Trabzon

doi:10.3906/muh-1005-22

The design and analysis of a novel MEMS force amplifier

Ergin Kosa^*, Ümit Sonmez, Hüseyin Kizil, Levent Trabzon

^*Corresponding author for this work

Istanbul Technical University

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

Compliant micromechanisms achieve high amplification of forces that can be used as a cutting force in micro- and nanofabrication. In the present study, we designed, simulated, and optimized a novel, simple micro-compliant system by SOI-MUMPs technology. The position and quasi-static analysis of a rigid body model were derived by MATLAB and simulated in ANSYS. It was found that an amplification factor of as much as 11.1 was achieved. The amplification factor increased as the micro-compliant force amplifier got closer to 0, but it decreased as the crank angle was further from 0.

Original language	English
Pages (from-to)	253-259
Number of pages	7
Journal	Turkish Journal of Engineering and Environmental Sciences
Volume	34
Issue number	4
DOIs	https://doi.org/10.3906/muh-1005-22
Publication status	Published - 2010

Keywords

Compliant
Force amplifier
MEMS
Micromechanism
SOI-MUMPs technology

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.3906/muh-1005-22

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AU - Kosa, Ergin

AU - Sonmez, Ümit

AU - Kizil, Hüseyin

AU - Trabzon, Levent

PY - 2010

Y1 - 2010

N2 - Compliant micromechanisms achieve high amplification of forces that can be used as a cutting force in micro- and nanofabrication. In the present study, we designed, simulated, and optimized a novel, simple micro-compliant system by SOI-MUMPs technology. The position and quasi-static analysis of a rigid body model were derived by MATLAB and simulated in ANSYS. It was found that an amplification factor of as much as 11.1 was achieved. The amplification factor increased as the micro-compliant force amplifier got closer to 0, but it decreased as the crank angle was further from 0.

AB - Compliant micromechanisms achieve high amplification of forces that can be used as a cutting force in micro- and nanofabrication. In the present study, we designed, simulated, and optimized a novel, simple micro-compliant system by SOI-MUMPs technology. The position and quasi-static analysis of a rigid body model were derived by MATLAB and simulated in ANSYS. It was found that an amplification factor of as much as 11.1 was achieved. The amplification factor increased as the micro-compliant force amplifier got closer to 0, but it decreased as the crank angle was further from 0.

KW - Compliant

KW - Force amplifier

KW - MEMS

KW - Micromechanism

KW - SOI-MUMPs technology

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EP - 259

JO - Turkish Journal of Engineering and Environmental Sciences

JF - Turkish Journal of Engineering and Environmental Sciences

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ER -

The design and analysis of a novel MEMS force amplifier

Abstract

Keywords

UN SDGs

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