Synthesis of ZnO nanoparticles via spray atomization assisted inductively coupled plasma technique

Spray atomization-assisted inductively coupled plasma system, for the first time, was utilized to synthesize ZnO nanoparticles at atmospheric pressure from a liquid precursor with varying process parameters, such as precursor concentrations and flow rates, carrier gas flow rates, and with or without the utilization of quenching gas (dry air or oxygen). The ZnO nanoparticles were characterized by FTIR, XRD, TEM, and SAED methods to evaluate the effect of process parameters on the morphology, particle size and size distribution of the final particles. The particles were in equiaxed morphology with mean particle sizes varying between 17.5 ± 9.5 nm and 25.7 ± 11.2 nm.