Structure and properties of TiN coatings produced with PIII&D technique using high efficiency rectilinear filter cathodic arc plasma

S. S. Akkaya; V. V. Vasyliev; E. N. Reshetnyak; K. Kazmanli; N. Solak; V. E. Strel'nitskij; M. Ürgen

doi:10.1016/j.surfcoat.2013.10.009

Structure and properties of TiN coatings produced with PIII&D technique using high efficiency rectilinear filter cathodic arc plasma

S. S. Akkaya, V. V. Vasyliev, E. N. Reshetnyak, K. Kazmanli, N. Solak, V. E. Strel'nitskij^*, M. Ürgen

^*Corresponding author for this work

Department of Metallurgical and Materials Engineering

Research output: Contribution to journal › Article › peer-review

29 Citations (Scopus)

Abstract

In this study, the effects of pulse bias application during plasma immersion ion implantation and deposition (PIII&D) on the structural, mechanical and tribological properties of TiN coatings are investigated. The coatings produced with the application of pulsed bias showed several distinct changes, depending on the type and magnitude of the bias potential. With increasing pulse bias potential, preferred orientation of crystallite planes parallel to the coating surface, gradually changed from (111) to (220), accompanied by a structural transition from Zone T to Zone 2 type structure. Internal stress levels also showed a dependence on the type of bias and bias potential. The results of wear tests clearly revealed significant improvement of tribological properties with the application of pulsed bias.

Original language	English
Pages (from-to)	332-340
Number of pages	9
Journal	Surface and Coatings Technology
Volume	236
DOIs	https://doi.org/10.1016/j.surfcoat.2013.10.009
Publication status	Published - 15 Dec 2013

Funding

This work has been supported within the scope of the bilateral cooperation project between the National Academy of Science of Ukraine (NASU) and the Scientific and Technological Research Council of Turkey (TUBITAK) (Contract No.: TUBITAK 110M390 ).

Funders	Funder number
TUBITAK	110M390
Türkiye Bilimsel ve Teknolojik Araştirma Kurumu
National Academy of Sciences of Ukraine

Keywords

Adhesion
Filtered cathodic arc
PIII&D
TiN
Tribological properties

Access to Document

10.1016/j.surfcoat.2013.10.009

Cite this

@article{56e2fdfdfb9845ea9a9bb30dcbc1a772,

title = "Structure and properties of TiN coatings produced with PIII&D technique using high efficiency rectilinear filter cathodic arc plasma",

abstract = "In this study, the effects of pulse bias application during plasma immersion ion implantation and deposition (PIII&D) on the structural, mechanical and tribological properties of TiN coatings are investigated. The coatings produced with the application of pulsed bias showed several distinct changes, depending on the type and magnitude of the bias potential. With increasing pulse bias potential, preferred orientation of crystallite planes parallel to the coating surface, gradually changed from (111) to (220), accompanied by a structural transition from Zone T to Zone 2 type structure. Internal stress levels also showed a dependence on the type of bias and bias potential. The results of wear tests clearly revealed significant improvement of tribological properties with the application of pulsed bias.",

keywords = "Adhesion, Filtered cathodic arc, PIII&D, TiN, Tribological properties",

author = "Akkaya, {S. S.} and Vasyliev, {V. V.} and Reshetnyak, {E. N.} and K. Kazmanli and N. Solak and Strel'nitskij, {V. E.} and M. {\"U}rgen",

year = "2013",

month = dec,

day = "15",

doi = "10.1016/j.surfcoat.2013.10.009",

language = "English",

volume = "236",

pages = "332--340",

journal = "Surface and Coatings Technology",

issn = "0257-8972",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Structure and properties of TiN coatings produced with PIII&D technique using high efficiency rectilinear filter cathodic arc plasma

AU - Akkaya, S. S.

AU - Vasyliev, V. V.

AU - Reshetnyak, E. N.

AU - Kazmanli, K.

AU - Solak, N.

AU - Strel'nitskij, V. E.

AU - Ürgen, M.

PY - 2013/12/15

Y1 - 2013/12/15

N2 - In this study, the effects of pulse bias application during plasma immersion ion implantation and deposition (PIII&D) on the structural, mechanical and tribological properties of TiN coatings are investigated. The coatings produced with the application of pulsed bias showed several distinct changes, depending on the type and magnitude of the bias potential. With increasing pulse bias potential, preferred orientation of crystallite planes parallel to the coating surface, gradually changed from (111) to (220), accompanied by a structural transition from Zone T to Zone 2 type structure. Internal stress levels also showed a dependence on the type of bias and bias potential. The results of wear tests clearly revealed significant improvement of tribological properties with the application of pulsed bias.

AB - In this study, the effects of pulse bias application during plasma immersion ion implantation and deposition (PIII&D) on the structural, mechanical and tribological properties of TiN coatings are investigated. The coatings produced with the application of pulsed bias showed several distinct changes, depending on the type and magnitude of the bias potential. With increasing pulse bias potential, preferred orientation of crystallite planes parallel to the coating surface, gradually changed from (111) to (220), accompanied by a structural transition from Zone T to Zone 2 type structure. Internal stress levels also showed a dependence on the type of bias and bias potential. The results of wear tests clearly revealed significant improvement of tribological properties with the application of pulsed bias.

KW - Adhesion

KW - Filtered cathodic arc

KW - PIII&D

KW - TiN

KW - Tribological properties

UR - http://www.scopus.com/inward/record.url?scp=84888834851&partnerID=8YFLogxK

U2 - 10.1016/j.surfcoat.2013.10.009

DO - 10.1016/j.surfcoat.2013.10.009

M3 - Article

AN - SCOPUS:84888834851

SN - 0257-8972

VL - 236

SP - 332

EP - 340

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

ER -

Structure and properties of TiN coatings produced with PIII&D technique using high efficiency rectilinear filter cathodic arc plasma

Abstract

Funding

Keywords

Access to Document

Other files and links

Fingerprint

Cite this