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Structural and optical properties of silicon carbonitride thin films deposited by reactive DC magnetron sputtering
Okan Agirseven*, Tolga Tavsanoglu, Esra Ozkan Zayim, Onuralp Yucel
*Corresponding author for this work
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
1
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(Scopus)