Abstract
The sputtering process of the Ar+Ni(1 0 0) collision system is investigated by means of constant energy molecular dynamics simulations. The Ni(1 0 0) is mimicked by an embedded-atom potential, and the interaction between the projectile and the surface is modelled by using four different screened Coulomb type potentials. The Ni atom emission from the lattice is analyzed over the range of 10-40 eV collision energy. The maximum penetration depths of Ar, probability distributions of kinetic energy of the reflected Ar, and energy of the Ar and sputtered Ni atoms in the same collision events are evaluated as functions of the impact energy and sputtering time. Further, angular distributions of the scattered Ar are obtained. The calculated sputtering yields are compared with the available theoretical and experimental data.
| Original language | English |
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| Pages (from-to) | 854-860 |
| Number of pages | 7 |
| Journal | Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms |
| Volume | 164 |
| DOIs | |
| Publication status | Published - Apr 2000 |
| Externally published | Yes |
| Event | ICACS-18: 18th International Conference on Atomic Collisions in Solids - Odense, Denmark Duration: 3 Aug 1999 → 8 Aug 1999 |
Funding
We would like to thank the Deutsche Forschungsgemeinschaft (DFG) for partial support through SFB 198 “Kinetik partiell ionisierter Plasmen”. One of us (YH) would like to thank the Istanbul Technical University for their support.
| Funders | Funder number |
|---|---|
| Deutsche Forschungsgemeinschaft | SFB 198 |