Sensitivity enhancement of bimaterial MOEMS thermal imaging sensor array using 2-λ wavelength readout

O. Ferhanoǧlu*, H. Urey

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Citations (Scopus)

Abstract

Diffraction gratings integrated with MEMS sensors offer sensitive displacement measurements. However, the sensitivity of the interferometric readout may drop significantly based on the sensor position. A two wavelength readout method was developed and tested previously in order to maintain the sensitivity of the readout > %50 maximum sensitivity over a broad range (i.e. several um's for visible wavelengths). This work demonstrates the sensitivity enhancement of a MEMS thermal imaging sensor array. Measurement of the target scene was performed using two lasers at different wavelengths (633, 650 nm). The diffracted 1st order light from the array was imaged onto a single CCD camera for both sources. The target scene was reconstructed by observing the change in the 1st diffracted order diffraction intensity for both wavelengths. Merging of the data, acquired with two different sources, is performed by assigning each pixel in the final image with the higher sensitivity pixel among two measurements. > 30% increase in the average sensitivity was demonstrated for the sensor array.

Original languageEnglish
Title of host publicationOptical Micro- and Nanometrology III
DOIs
Publication statusPublished - 2010
Externally publishedYes
EventOptical Micro- and Nanometrology III - Brussels, Belgium
Duration: 13 Apr 201016 Apr 2010

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume7718
ISSN (Print)0277-786X

Conference

ConferenceOptical Micro- and Nanometrology III
Country/TerritoryBelgium
CityBrussels
Period13/04/1016/04/10

Keywords

  • CCD camera
  • Diffraction orders
  • Grating Interferometry
  • MEMS
  • Thermal imaging sensor array
  • Two-wavelength interferometry

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