Abstract
In the present work, the residual stresses of (Zr,Hf)N films were measured using X-ray diffraction (XRD) fixed incident multiplane technique (FIM) for varying amounts of Hf addition by assuming the film was isotropic and anisotropic (Krönel model). The residual stress values calculated according to isotropic and anisotropic models were almost the same (-6 GPa). Addition up to 11.9 at.% Hf into ZrN films did not affect the level of residual stress.
Original language | English |
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Pages (from-to) | 188-194 |
Number of pages | 7 |
Journal | Surface and Coatings Technology |
Volume | 191 |
Issue number | 2-3 |
DOIs | |
Publication status | Published - 21 Feb 2005 |
Funding
The authors gratefully acknowledge the support of NATO TU PVD Coatings Project for the equipment supplied to the Metallurgical and Material Engineering Department of Istanbul Technical University, which was utilized in this study.
Funders | Funder number |
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North Atlantic Treaty Organization | |
Istanbul Teknik Üniversitesi |
Keywords
- Coatings
- Residual stress
- Thin film
- X-ray diffraction
- ZrN and HfN