Residual stress estimation of ceramic thin films by X-ray diffraction and indentation techniques

Erdem Atar; Cevat Sarioglu; Ugur Demirler; E. Sabri Kayali; Huseyin Cimenoglu

doi:10.1016/S1359-6462(03)00019-8

Residual stress estimation of ceramic thin films by X-ray diffraction and indentation techniques

Erdem Atar, Cevat Sarioglu, Ugur Demirler, E. Sabri Kayali, Huseyin Cimenoglu^*

^*Corresponding author for this work

Department of Metallurgical and Materials Engineering

Research output: Contribution to journal › Article › peer-review

55 Citations (Scopus)

Abstract

The residual stresses of CrN, MoN, ZrN and Zr(21%Hf, N) ceramic thin films were examined. Hardness tests were carried out by the instrumentation indendation method. This method is based on the calculation of the difference between the indendation contact areas of stressed and unstressed surfaces by analyzing indendation load-depth data. Residual stresses calculated by this method were found to be three times higher than those of the classical X-ray diffraction method.

Original language	English
Pages (from-to)	1331-1336
Number of pages	6
Journal	Scripta Materialia
Volume	48
Issue number	9
DOIs	https://doi.org/10.1016/S1359-6462(03)00019-8
Publication status	Published - May 2003

Funding

The authors gratefully acknowledge the support of the NATO TU PVD Coatings Project for the equipment supplied to the Metallurgical and Materials Engineering Department of Istanbul Technical University for this study.

Funders	Funder number
North Atlantic Treaty Organization
Istanbul Teknik Üniversitesi

Keywords

Microindentation
Residual stresses
Thin films
X-ray diffraction

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10.1016/S1359-6462(03)00019-8

Cite this

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abstract = "The residual stresses of CrN, MoN, ZrN and Zr(21%Hf, N) ceramic thin films were examined. Hardness tests were carried out by the instrumentation indendation method. This method is based on the calculation of the difference between the indendation contact areas of stressed and unstressed surfaces by analyzing indendation load-depth data. Residual stresses calculated by this method were found to be three times higher than those of the classical X-ray diffraction method.",

keywords = "Microindentation, Residual stresses, Thin films, X-ray diffraction",

author = "Erdem Atar and Cevat Sarioglu and Ugur Demirler and {Sabri Kayali}, E. and Huseyin Cimenoglu",

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AU - Atar, Erdem

AU - Sarioglu, Cevat

AU - Demirler, Ugur

AU - Sabri Kayali, E.

AU - Cimenoglu, Huseyin

PY - 2003/5

Y1 - 2003/5

N2 - The residual stresses of CrN, MoN, ZrN and Zr(21%Hf, N) ceramic thin films were examined. Hardness tests were carried out by the instrumentation indendation method. This method is based on the calculation of the difference between the indendation contact areas of stressed and unstressed surfaces by analyzing indendation load-depth data. Residual stresses calculated by this method were found to be three times higher than those of the classical X-ray diffraction method.

AB - The residual stresses of CrN, MoN, ZrN and Zr(21%Hf, N) ceramic thin films were examined. Hardness tests were carried out by the instrumentation indendation method. This method is based on the calculation of the difference between the indendation contact areas of stressed and unstressed surfaces by analyzing indendation load-depth data. Residual stresses calculated by this method were found to be three times higher than those of the classical X-ray diffraction method.

KW - Microindentation

KW - Residual stresses

KW - Thin films

KW - X-ray diffraction

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U2 - 10.1016/S1359-6462(03)00019-8

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VL - 48

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JO - Scripta Materialia

JF - Scripta Materialia

IS - 9

ER -

Residual stress estimation of ceramic thin films by X-ray diffraction and indentation techniques

Abstract

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Keywords

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