Production of Un-Doped and Er-Doped Y2O3 Thin Films by Electron Beam Evaporation Method

Fatma Unal*, Kursat Kazmanli

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)


In this study, un-doped and doped yttrium oxide (Y2O3) powders with different erbium concentrations were synthesized using sol-gel method. The synthesized powders were investigated by Raman analysis and the evolution of different peaks associated with Er dopant in Y2O3 structure was clearly observed. Moreover, the powders were deposited on Corning glasses using electron beam (e-beam) evaporation method. The samples were heat-treated at 300 and 400°C temperatures for 6 h. The effects of the heat treatment temperatures and dopant concentrations on the optical properties were investigated. Phase constituents of the thin films were analyzed by X-ray diffraction with a thin film attachment using Cu-Kα radiation. Optical transmittance curves of the films were measured using optical spectrophotometer. Cross sectional morphologies of the films were examined using scanning electron microscopy (SEM). It was observed that Er dopants caused a shift in the transmittance curves to UV region.

Original languageEnglish
Pages (from-to)204-209
Number of pages6
JournalPowder Metallurgy and Metal Ceramics
Issue number3-4
Publication statusPublished - 1 Jul 2019

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© 2019, Springer Science+Business Media, LLC, part of Springer Nature.


  • Er-doped YO
  • Raman analysis
  • electron beam evaporation method
  • optical transmittance
  • sol-gel method


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