Abstract
A magnetically actuated microscanner is used in a laser scanning microscopy application. Stress distribution along the circular-profiled flexure is compared with a rectangular counterpart in finite-element environment. Magnetic actuation mechanism of the scanning unit is explained in detail. Moreover, reliability of the scanner is tested for 3×106 cycle. The scanning device is designed to meet a confocal microscopy application providing 100μm×100μm field of view and <3-μm lateral resolution. The resonance frequencies of the device were analytically modeled, where we obtained 130- and 268-Hz resonance values for the out-of-plane and torsion modes, respectively. The scanning device provided an optical scan angle about 2.5 deg for 170-mA drive current, enabling the desired field of view for our custom built confocal microscope setup. Finally, imaging experiments were conducted on a resolution target, showcasing the desired scan area and resolution.
| Original language | English |
|---|---|
| Article number | 041405 |
| Journal | Optical Engineering |
| Volume | 57 |
| Issue number | 4 |
| DOIs | |
| Publication status | Published - 1 Apr 2018 |
Bibliographical note
Publisher Copyright:© 2018 Society of Photo-Optical Instrumentation Engineers (SPIE).
Keywords
- confocal microscopy
- electromagnetic optics
- micro-optical devices
- scanners