Parylene based uncooled thermomechanical array

Onur Ferhanoglu*, M. Fatih Toy, Hakan Urey

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Citations (Scopus)


Novel thermo-mechanical detector arrays with integrated diffraction grating for optical readout were designed and fabricated. Parylene was used as the structural material due to its high thermal isolation and mismatch properties. Calculations reveal that the NETD performance of a thermo-mechanical array using Parylene can be significantly better than SiNx based designs and offer a theoretical NETD value <10mK assuming an optical readout with a high dynamic range detector array. Finite Element simulations were performed with length of the bimaterial leg as the optimization parameter. It was observed that only a few microns of isolation leg supported 30 fps applications, leaving rest of the leg to be bimaterial and providing large thermo-mechanical deflections.

Original languageEnglish
Title of host publicationInfrared Technology and Applications XXXV
Publication statusPublished - 2009
Externally publishedYes
EventInfrared Technology and Applications XXXV - Orlando, FL, United States
Duration: 13 Apr 200917 Apr 2009

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


ConferenceInfrared Technology and Applications XXXV
Country/TerritoryUnited States
CityOrlando, FL


  • Bimaterial
  • Bimorph
  • Diffraction grating
  • Optical readout
  • Thermo-mechanical detector


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