Optical, electrical and microstructural properties of SiC thin films deposited by reactive dc magnetron sputtering

T. Tavsanoglu*, E. O. Zayim, O. Agirseven, S. Yildirim, O. Yucel

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

17 Citations (Scopus)

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Keyphrases

Engineering

Material Science