Keyphrases
Microstructural Properties
100%
Optoelectronic Properties
100%
Silicon Carbide Film
100%
DC Reactive Magnetron Sputtering
100%
Band Gap Value
40%
Gas Flow Rate
40%
Reactive Gas
40%
Film Thickness
20%
Optical Properties
20%
Visible Light
20%
Electrical Properties
20%
Transmittance
20%
Optical Band Gap
20%
Carbon Concentration
20%
Spectrophotometer
20%
Activation Energy
20%
Refractive Index
20%
Glass Substrate
20%
Optical Transmittance
20%
Extinction Coefficient
20%
Optical Constants
20%
Variable Composition
20%
Deposited Film
20%
Dark Conductivity
20%
Si (100) Substrate
20%
Si Concentration
20%
C Concentration
20%
CH 4
20%
Spectral Range
20%
Optical Reflectance
20%
Silicon Target
20%
Coating Composition
20%
Amorphous Silicon Carbide
20%
Direct Current Reactive Magnetron Sputtering
20%
High-purity Silicon
20%
Engineering
Magnetron
100%
Thin Films
100%
Phase Composition
100%
Gap Value
66%
Gas Flowrate
66%
Band Gap
66%
Activation Energy
33%
Refractive Index
33%
Extinction Coefficient
33%
Carbon Concentration
33%
Deposited Film
33%
Spectral Range
33%
Reflectance
33%
Direct Current
33%
Glass Substrate
33%
Refractivity
33%
Material Science
Magnetron Sputtering
100%
Thin Films
100%
Film
100%
Silicon Carbide
100%
Phase Composition
50%
Gas Flow
33%
Film Thickness
16%
Refractive Index
16%
Amorphous Silicon
16%