Molecular monolayers for conformal, nanoscale doping of InP nanopillar photovoltaics

Kee Cho; Daniel J. Ruebusch; Min Hyung Lee; Jae Hyun Moon; Alexandra C. Ford; Rehan Kapadia; Kuniharu Takei; Onur Ergen; Ali Javey

doi:10.1063/1.3585138

Molecular monolayers for conformal, nanoscale doping of InP nanopillar photovoltaics

Kee Cho^*, Daniel J. Ruebusch, Min Hyung Lee, Jae Hyun Moon, Alexandra C. Ford, Rehan Kapadia, Kuniharu Takei, Onur Ergen, Ali Javey

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

53 Citations (Scopus)

Abstract

Semiconductor nanopillar arrays with radially doped junctions have been widely proposed as an attractive device architecture for cost effective and high efficiency solar cells. A challenge in the fabrication of three-dimensional nanopillar devices is the need for highly abrupt and conformal junctions along the radial axes. Here, a sulfur monolayer doping scheme is implemented to achieve conformal ultrashallow junctions with sub-10 nm depths and a high electrically active dopant concentration of 10¹⁹ - 10²⁰ cm^-3 in arrays of InP nanopillars. The enabled solar cells exhibit a respectable conversion efficiency of 8.1% and a short circuit current density of 25 mA/ cm³. The work demonstrates the utility of well-established surface chemistry for fabrication of nonplanar junctions for complex devices.

Original language	English
Article number	203101
Journal	Applied Physics Letters
Volume	98
Issue number	20
DOIs	https://doi.org/10.1063/1.3585138
Publication status	Published - 16 May 2011
Externally published	Yes

Funding

This work was supported by Mohr Davidow Ventures and NSF (Grant No. 0826145). The S-MLD process development was supported by a LDRD from LBNL. A.J. acknowledges a Sloan research fellowship and support from the World Class University program at Sunchon National University. J.M. acknowledges financial support from Korea Institute for Advancement of Technology (KIAT). R.K. acknowledges an NSF Graduate Fellowship.

Funders	Funder number
Mohr Davidow Ventures
National Science Foundation	0826145
Lawrence Berkeley National Laboratory
Laboratory Directed Research and Development
Sunchon National University
Korea Institute for Advancement of Technology

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1063/1.3585138

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abstract = "Semiconductor nanopillar arrays with radially doped junctions have been widely proposed as an attractive device architecture for cost effective and high efficiency solar cells. A challenge in the fabrication of three-dimensional nanopillar devices is the need for highly abrupt and conformal junctions along the radial axes. Here, a sulfur monolayer doping scheme is implemented to achieve conformal ultrashallow junctions with sub-10 nm depths and a high electrically active dopant concentration of 1019 - 1020 cm-3 in arrays of InP nanopillars. The enabled solar cells exhibit a respectable conversion efficiency of 8.1% and a short circuit current density of 25 mA/ cm3. The work demonstrates the utility of well-established surface chemistry for fabrication of nonplanar junctions for complex devices.",

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AU - Cho, Kee

AU - Ruebusch, Daniel J.

AU - Lee, Min Hyung

AU - Moon, Jae Hyun

AU - Ford, Alexandra C.

AU - Kapadia, Rehan

AU - Takei, Kuniharu

AU - Ergen, Onur

AU - Javey, Ali

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AB - Semiconductor nanopillar arrays with radially doped junctions have been widely proposed as an attractive device architecture for cost effective and high efficiency solar cells. A challenge in the fabrication of three-dimensional nanopillar devices is the need for highly abrupt and conformal junctions along the radial axes. Here, a sulfur monolayer doping scheme is implemented to achieve conformal ultrashallow junctions with sub-10 nm depths and a high electrically active dopant concentration of 1019 - 1020 cm-3 in arrays of InP nanopillars. The enabled solar cells exhibit a respectable conversion efficiency of 8.1% and a short circuit current density of 25 mA/ cm3. The work demonstrates the utility of well-established surface chemistry for fabrication of nonplanar junctions for complex devices.

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Molecular monolayers for conformal, nanoscale doping of InP nanopillar photovoltaics

Abstract

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UN SDGs

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