Abstract
The concept of low or mildly energetic but intense ion bombardment was applied to coatings based on the nitrides and diborides of the transition metals titanium and zirconium. Coatings were deposited using non-reactive unbalanced d.c. magnetron sputtering. Films were bombarded by means of argon ions with varying energy (E(i)) and intensity (ion atom flux ratio J(i)/J(a)). Fracture cross-sections revealed the existence of the transition zone (zone T) structure for all coatings. TiN and ZrN coatings, which are exposed to low energetic bombardment, revealed a preferred growth on (111) lattice planes. Mildly energetic and intense bombardment resulted in a shift of the preferred orientation to (100). TiB2 and ZrB2 films grow more or less randomly under low energetic and less intense bombardment. However, they displayed a preferred (001) orientation with increasing intensity of the ion irradiation. The hardness of the coatings increased by the effect of both mildly energetic and intense ton bombardment, mainly as a result of reduced film porosity and to a lesser extent due to reduced crystal size and increasing film stresses.
Original language | English |
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Pages (from-to) | 133-140 |
Number of pages | 8 |
Journal | Surface and Coatings Technology |
Volume | 116-119 |
DOIs | |
Publication status | Published - Sept 1999 |
Event | Proceedings of the 1998 6th International Conference on Plasma Surface Engineering (PSE-98) - Garmisch-Partenkirchen, Ger Duration: 14 Sept 1998 → 18 Sept 1998 |
Funding
Parts of the work performed at the University of Leoben and Istanbul Technical University were supported by the Bundesministerium für Wissenschaft, Verkehr und Kunst under Contract GZ.49.915, by the Fonds zur Förderung der wissenschaftlichen Forschung (Project P 10764 ÖTE) and NATO SfS TU-PVD Coatings Project, respectively. One of the authors (E.K.) gratefully acknowledges the financial support of Yildiz Technical University, Istanbul (Tr) and the Österreichisches Kulturinstitut, Istanbul (Tr).
Funders | Funder number |
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North Atlantic Treaty Organization | |
Bundesministerium für Verkehr und Digitale Infrastruktur | GZ.49.915 |
Austrian Science Fund | P 10764 |
Yildiz Teknik Üniversitesi | |
Österreichisches Kulturinstitut |
Keywords
- Hardness
- Ion bombardment
- Microstructure
- Titanium diboride
- Titanium nitride
- Zirconium diboride
- Zirconium nitride