Microstructure and properties of nitride and diboride hard coatings deposited under intense mild-energy ion bombardment

E. Kelesoglu, C. Mitterer*, M. K. Kazmanli, M. Ürgen

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

76 Citations (Scopus)

Abstract

The concept of low or mildly energetic but intense ion bombardment was applied to coatings based on the nitrides and diborides of the transition metals titanium and zirconium. Coatings were deposited using non-reactive unbalanced d.c. magnetron sputtering. Films were bombarded by means of argon ions with varying energy (E(i)) and intensity (ion atom flux ratio J(i)/J(a)). Fracture cross-sections revealed the existence of the transition zone (zone T) structure for all coatings. TiN and ZrN coatings, which are exposed to low energetic bombardment, revealed a preferred growth on (111) lattice planes. Mildly energetic and intense bombardment resulted in a shift of the preferred orientation to (100). TiB2 and ZrB2 films grow more or less randomly under low energetic and less intense bombardment. However, they displayed a preferred (001) orientation with increasing intensity of the ion irradiation. The hardness of the coatings increased by the effect of both mildly energetic and intense ton bombardment, mainly as a result of reduced film porosity and to a lesser extent due to reduced crystal size and increasing film stresses.

Original languageEnglish
Pages (from-to)133-140
Number of pages8
JournalSurface and Coatings Technology
Volume116-119
DOIs
Publication statusPublished - Sept 1999
EventProceedings of the 1998 6th International Conference on Plasma Surface Engineering (PSE-98) - Garmisch-Partenkirchen, Ger
Duration: 14 Sept 199818 Sept 1998

Funding

Parts of the work performed at the University of Leoben and Istanbul Technical University were supported by the Bundesministerium für Wissenschaft, Verkehr und Kunst under Contract GZ.49.915, by the Fonds zur Förderung der wissenschaftlichen Forschung (Project P 10764 ÖTE) and NATO SfS TU-PVD Coatings Project, respectively. One of the authors (E.K.) gratefully acknowledges the financial support of Yildiz Technical University, Istanbul (Tr) and the Österreichisches Kulturinstitut, Istanbul (Tr).

FundersFunder number
North Atlantic Treaty Organization
Bundesministerium für Verkehr und Digitale InfrastrukturGZ.49.915
Austrian Science FundP 10764
Yildiz Teknik Üniversitesi
Österreichisches Kulturinstitut

    Keywords

    • Hardness
    • Ion bombardment
    • Microstructure
    • Titanium diboride
    • Titanium nitride
    • Zirconium diboride
    • Zirconium nitride

    Fingerprint

    Dive into the research topics of 'Microstructure and properties of nitride and diboride hard coatings deposited under intense mild-energy ion bombardment'. Together they form a unique fingerprint.

    Cite this