TY - GEN
T1 - Micro position control of a 3-RRR compliant mechanism
AU - Acer, Merve
AU - Şabanoviç, Asif
PY - 2013
Y1 - 2013
N2 - A planar parallel compliant mechanism based on 3-RRR kinematic structure is designed to be used as a micro positioning stage. The position of the center is measured by using a laser position sensor and the mechanism is actuated by piezoelectric actuators. The stage displacements are analyzed by using structural Finite Element Analysis (FEA). However the experimental displacement results for the manufactured mechanism are not compatible with the FEA which means that we have errors due to manufacturing, assembly etc. A position control using Sliding Mode Control with Disturbance Observer is proposed for the reference tracking of the center of the stage. Piezoelectric actuator linear models are used for disturbance rejection. Finally, the position control of the mechanism is succeeded although it has inadmissible errors compared to FEA.
AB - A planar parallel compliant mechanism based on 3-RRR kinematic structure is designed to be used as a micro positioning stage. The position of the center is measured by using a laser position sensor and the mechanism is actuated by piezoelectric actuators. The stage displacements are analyzed by using structural Finite Element Analysis (FEA). However the experimental displacement results for the manufactured mechanism are not compatible with the FEA which means that we have errors due to manufacturing, assembly etc. A position control using Sliding Mode Control with Disturbance Observer is proposed for the reference tracking of the center of the stage. Piezoelectric actuator linear models are used for disturbance rejection. Finally, the position control of the mechanism is succeeded although it has inadmissible errors compared to FEA.
KW - 3-RRR mechanism
KW - compliant mechanism
KW - flexure based mechanism
KW - observer
KW - piezoelectric actuator control
KW - sliding mode control
UR - http://www.scopus.com/inward/record.url?scp=84877625382&partnerID=8YFLogxK
U2 - 10.1109/ICIT.2013.6505658
DO - 10.1109/ICIT.2013.6505658
M3 - Conference contribution
AN - SCOPUS:84877625382
SN - 9781467345699
T3 - Proceedings of the IEEE International Conference on Industrial Technology
SP - 118
EP - 123
BT - Proceedings - 2013 IEEE International Conference on Industrial Technology, ICIT 2013
T2 - 2013 IEEE International Conference on Industrial Technology, ICIT 2013
Y2 - 25 February 2013 through 28 February 2013
ER -