MEMS bimaterial IR sensor array with AC-coupled optical readout

Keyphrases

• Optical Readout 100%
• Bi-material 100%
• IR Sensor Array 100%
• AC Coupling 100%
• Sensor Array 33%
• Photodetector 33%
• High Dynamic Range 33%
• Optical Noise 33%
• Noise Dynamics 33%
• Pixel pitch 33%
• Smart pixel Camera 33%
• Low Noise 33%
• Readout Method 33%
• Thermal Sensor Array 33%
• Read Sensor 33%

Engineering

• Sensor Array 100%
• Photodetector 33%
• Dynamic Range 33%
• Optical Noise 33%
• Thermal Sensor 33%
• Pixel Pitch 33%