MEMS bimaterial IR sensor array with AC-coupled optical readout

Ulas Adiyan; Fehmi Civitci; Onur Ferhanoglu; Hamdi Torun; Hakan Urey

doi:10.1109/OMN.2015.7288834

MEMS bimaterial IR sensor array with AC-coupled optical readout

Ulas Adiyan, Fehmi Civitci, Onur Ferhanoglu, Hamdi Torun, Hakan Urey

Department of Electronics and Communication Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Citations (Scopus)

Abstract

This paper demonstrates a 35-μm pixel pitch MEMS thermal sensor array with optical-readout. We implemented an AC-coupled readout method for a single MEMS pixel using a photodetector, which responds only to changes in the scene. AC-coupled readout substantially reduced the optical noise by eliminating the large DC beam. This method can be scaled to achieve smart pixel cameras for read sensor arrays with low-noise and high dynamic range.

Original language	English
Title of host publication	OMN 2015 Jerusalem - 2015 International Conference on Optical MEMS and Nanophotonics, Proceedings
Publisher	IEEE Computer Society
ISBN (Electronic)	9781467368346
DOIs	https://doi.org/10.1109/OMN.2015.7288834
Publication status	Published - 2 Oct 2015
Event	International Conference on Optical MEMS and Nanophotonics, OMN 2015 - Jerusalem, Israel Duration: 2 Aug 2015 → 5 Aug 2015

Publication series

Name	International Conference on Optical MEMS and Nanophotonics
Volume	02-05-August-2015
ISSN (Print)	2160-5033
ISSN (Electronic)	2160-5041

Conference

Conference	International Conference on Optical MEMS and Nanophotonics, OMN 2015
Country/Territory	Israel
City	Jerusalem
Period	2/08/15 → 5/08/15

Bibliographical note

Publisher Copyright:
© 2015 IEEE.

Keywords

AC coupling
IR Detection
Optical Readout
Thermo-Mechanical MEMS

Access to Document

10.1109/OMN.2015.7288834

Cite this

Adiyan, U., Civitci, F., Ferhanoglu, O., Torun, H., & Urey, H. (2015). MEMS bimaterial IR sensor array with AC-coupled optical readout. In OMN 2015 Jerusalem - 2015 International Conference on Optical MEMS and Nanophotonics, Proceedings Article 7288834 (International Conference on Optical MEMS and Nanophotonics; Vol. 02-05-August-2015). IEEE Computer Society. https://doi.org/10.1109/OMN.2015.7288834

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title = "MEMS bimaterial IR sensor array with AC-coupled optical readout",

abstract = "This paper demonstrates a 35-μm pixel pitch MEMS thermal sensor array with optical-readout. We implemented an AC-coupled readout method for a single MEMS pixel using a photodetector, which responds only to changes in the scene. AC-coupled readout substantially reduced the optical noise by eliminating the large DC beam. This method can be scaled to achieve smart pixel cameras for read sensor arrays with low-noise and high dynamic range.",

keywords = "AC coupling, IR Detection, Optical Readout, Thermo-Mechanical MEMS",

author = "Ulas Adiyan and Fehmi Civitci and Onur Ferhanoglu and Hamdi Torun and Hakan Urey",

note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; International Conference on Optical MEMS and Nanophotonics, OMN 2015 ; Conference date: 02-08-2015 Through 05-08-2015",

year = "2015",

month = oct,

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doi = "10.1109/OMN.2015.7288834",

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Adiyan, U, Civitci, F, Ferhanoglu, O, Torun, H & Urey, H 2015, MEMS bimaterial IR sensor array with AC-coupled optical readout. in OMN 2015 Jerusalem - 2015 International Conference on Optical MEMS and Nanophotonics, Proceedings., 7288834, International Conference on Optical MEMS and Nanophotonics, vol. 02-05-August-2015, IEEE Computer Society, International Conference on Optical MEMS and Nanophotonics, OMN 2015, Jerusalem, Israel, 2/08/15. https://doi.org/10.1109/OMN.2015.7288834

MEMS bimaterial IR sensor array with AC-coupled optical readout. / Adiyan, Ulas; Civitci, Fehmi; Ferhanoglu, Onur et al.
OMN 2015 Jerusalem - 2015 International Conference on Optical MEMS and Nanophotonics, Proceedings. IEEE Computer Society, 2015. 7288834 (International Conference on Optical MEMS and Nanophotonics; Vol. 02-05-August-2015).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Civitci, Fehmi

AU - Ferhanoglu, Onur

AU - Torun, Hamdi

AU - Urey, Hakan

PY - 2015/10/2

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AB - This paper demonstrates a 35-μm pixel pitch MEMS thermal sensor array with optical-readout. We implemented an AC-coupled readout method for a single MEMS pixel using a photodetector, which responds only to changes in the scene. AC-coupled readout substantially reduced the optical noise by eliminating the large DC beam. This method can be scaled to achieve smart pixel cameras for read sensor arrays with low-noise and high dynamic range.

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Y2 - 2 August 2015 through 5 August 2015

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MEMS bimaterial IR sensor array with AC-coupled optical readout

Abstract

Publication series

Conference

Bibliographical note

Keywords

Access to Document

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