TY - GEN
T1 - Measurement of charging under DUV laser by a test chip for moems and the mechanism of charging
AU - Trabzon, L.
AU - Lukat, K.
AU - Jankowski, I.
AU - Duerr, P.
AU - Schenk, H.
PY - 2006
Y1 - 2006
N2 - One of the important reliability problems in the micro-mirror structures is the drift in response due to electrostatic charging. Deep-UV (DUV) pulsed laser light has been recognized as a source of drift in certain applications of micromirrors, albeit not knowing the mechanism. We implemented a bottom-up approach to characterize the nature and mechanism of electrostatic charging problem in MOEMS. We developed new set of test structures in accordance with structure of mirrors and the technology and materials used in micromirror fabrication. The charging is seen to be independent on voltage applied between electrodes and de-charging is dependent on voltage. The laser light having energy level higher than metal-insulator barrier is the main source of charging which is a function of laser intensity, defect concentration in the insulator, time as well as type of insulator.
AB - One of the important reliability problems in the micro-mirror structures is the drift in response due to electrostatic charging. Deep-UV (DUV) pulsed laser light has been recognized as a source of drift in certain applications of micromirrors, albeit not knowing the mechanism. We implemented a bottom-up approach to characterize the nature and mechanism of electrostatic charging problem in MOEMS. We developed new set of test structures in accordance with structure of mirrors and the technology and materials used in micromirror fabrication. The charging is seen to be independent on voltage applied between electrodes and de-charging is dependent on voltage. The laser light having energy level higher than metal-insulator barrier is the main source of charging which is a function of laser intensity, defect concentration in the insulator, time as well as type of insulator.
UR - http://www.scopus.com/inward/record.url?scp=84908290048&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84908290048
T3 - Proceedings of the 6th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2006
SP - 66
EP - 70
BT - Proceedings of the 6th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2006
A2 - Zervos, H.
PB - euspen
T2 - 6th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2006
Y2 - 28 May 2006 through 1 June 2006
ER -