Investigation of warpage behavior of single crystal silicon on a silicon -adhesive -ceramicintegrated structure at cryogenic temperatures

E. Can Baloǧlu, Tuba Okutucu Özyurt, Zafer Dursunkaya

Research output: Contribution to conference › Paper › peer-review

Original language	English
Publication status	Published - 2016
Event	IMAPS 12th International Conference and Exhibition on Device Packaging - Fountain Hills, United States Duration: 14 Mar 2016 → 17 Mar 2016

Conference	IMAPS 12th International Conference and Exhibition on Device Packaging
Country/Territory	United States
City	Fountain Hills
Period	14/03/16 → 17/03/16

Cite this

@conference{3e03868db2ca4960b0a3320b781d3b56,

title = "Investigation of warpage behavior of single crystal silicon on a silicon -adhesive -ceramicintegrated structure at cryogenic temperatures",

author = "{Can Baloǧlu}, E. and {\"O}zyurt, {Tuba Okutucu} and Zafer Dursunkaya",

year = "2016",

language = "English",

note = "IMAPS 12th International Conference and Exhibition on Device Packaging ; Conference date: 14-03-2016 Through 17-03-2016",

}

Investigation of warpage behavior of single crystal silicon on a silicon -adhesive -ceramicintegrated structure at cryogenic temperatures. / Can Baloǧlu, E.; Özyurt, Tuba Okutucu; Dursunkaya, Zafer.
2016. Paper presented at IMAPS 12th International Conference and Exhibition on Device Packaging, Fountain Hills, United States.

Research output: Contribution to conference › Paper › peer-review

TY - CONF

T1 - Investigation of warpage behavior of single crystal silicon on a silicon -adhesive -ceramicintegrated structure at cryogenic temperatures

AU - Can Baloǧlu, E.

AU - Özyurt, Tuba Okutucu

AU - Dursunkaya, Zafer

PY - 2016

Y1 - 2016

UR - http://www.scopus.com/inward/record.url?scp=84995639916&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:84995639916

T2 - IMAPS 12th International Conference and Exhibition on Device Packaging

Y2 - 14 March 2016 through 17 March 2016

ER -