Gas Flow Sensing with a Piezoresistive Silicon Nanowire-Based MEMS Force Sensor

Levent Demirkazik; Umut Kerimzade; Masoud Jedari Ghourichaei; Onur Aydin; Bekir Aksoy; Cemal Aydogan; Gokhan Nadar; Ivo W. Rangelow; Arda Deniz Yalcinkaya; Halil Bayraktar; Burhanettin Erdem Alaca

doi:10.1109/MEMS61431.2025.10917650

Gas Flow Sensing with a Piezoresistive Silicon Nanowire-Based MEMS Force Sensor

Levent Demirkazik, Umut Kerimzade, Masoud Jedari Ghourichaei, Onur Aydin, Bekir Aksoy, Cemal Aydogan, Gokhan Nadar, Ivo W. Rangelow, Arda Deniz Yalcinkaya, Halil Bayraktar, Burhanettin Erdem Alaca^*

^*Corresponding author for this work

Department of Molecular Biology and Genetics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

This paper introduces a novel flow sensor involving suspended piezoresistive silicon nanowires embedded in a MEMS platform. A highly linear response with a sensitivity of 6.26×10^-4 (m/s)^-1 is achieved within the velocity range of about 20 - 40 m/s. This translates to a very high sensitivity per effective sensing area, 7.37 ppm (m/s)^-1 μm^-2, and 1 nW power consumption, while operating over a velocity range similar to conventional bulky cantilever and diaphragm-based sensors. Further characterization performed at varying distances above the sensor surface demonstrates a spatial sensitivity of 4.90×10^-3 mm^-1. Sensor design enables high-density array operation where each MEMS unit acts as a force measurement pixel to analyze velocity gradients in various microfluidic flows with minimized power consumption and footprint.

Original language	English
Title of host publication	2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	809-812
Number of pages	4
ISBN (Electronic)	9798331508890
DOIs	https://doi.org/10.1109/MEMS61431.2025.10917650
Publication status	Published - 2025
Event	38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025 - Kaohsiung, Taiwan, Province of China Duration: 19 Jan 2025 → 23 Jan 2025

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025
Country/Territory	Taiwan, Province of China
City	Kaohsiung
Period	19/01/25 → 23/01/25

Bibliographical note

Publisher Copyright:
© 2025 IEEE.

Keywords

Flow sensing
Force Sensor
Low Power
Piezoresistive
Silicon Nanowire

Access to Document

10.1109/MEMS61431.2025.10917650

Cite this

Demirkazik, L., Kerimzade, U., Ghourichaei, M. J., Aydin, O., Aksoy, B., Aydogan, C., Nadar, G., Rangelow, I. W., Yalcinkaya, A. D., Bayraktar, H., & Alaca, B. E. (2025). Gas Flow Sensing with a Piezoresistive Silicon Nanowire-Based MEMS Force Sensor. In 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025 (pp. 809-812). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMS61431.2025.10917650

Demirkazik, Levent ; Kerimzade, Umut ; Ghourichaei, Masoud Jedari et al. / Gas Flow Sensing with a Piezoresistive Silicon Nanowire-Based MEMS Force Sensor. 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025. Institute of Electrical and Electronics Engineers Inc., 2025. pp. 809-812 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{6bd099dc1a9e4491982d1ba292e605c4,

title = "Gas Flow Sensing with a Piezoresistive Silicon Nanowire-Based MEMS Force Sensor",

abstract = "This paper introduces a novel flow sensor involving suspended piezoresistive silicon nanowires embedded in a MEMS platform. A highly linear response with a sensitivity of 6.26×10-4 (m/s)-1 is achieved within the velocity range of about 20 - 40 m/s. This translates to a very high sensitivity per effective sensing area, 7.37 ppm (m/s)-1 μm-2, and 1 nW power consumption, while operating over a velocity range similar to conventional bulky cantilever and diaphragm-based sensors. Further characterization performed at varying distances above the sensor surface demonstrates a spatial sensitivity of 4.90×10-3 mm-1. Sensor design enables high-density array operation where each MEMS unit acts as a force measurement pixel to analyze velocity gradients in various microfluidic flows with minimized power consumption and footprint.",

keywords = "Flow sensing, Force Sensor, Low Power, Piezoresistive, Silicon Nanowire",

author = "Levent Demirkazik and Umut Kerimzade and Ghourichaei, \{Masoud Jedari\} and Onur Aydin and Bekir Aksoy and Cemal Aydogan and Gokhan Nadar and Rangelow, \{Ivo W.\} and Yalcinkaya, \{Arda Deniz\} and Halil Bayraktar and Alaca, \{Burhanettin Erdem\}",

note = "Publisher Copyright: {\textcopyright} 2025 IEEE.; 38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025 ; Conference date: 19-01-2025 Through 23-01-2025",

year = "2025",

doi = "10.1109/MEMS61431.2025.10917650",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "809--812",

booktitle = "2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025",

address = "United States",

}

Demirkazik, L, Kerimzade, U, Ghourichaei, MJ, Aydin, O, Aksoy, B, Aydogan, C, Nadar, G, Rangelow, IW, Yalcinkaya, AD, Bayraktar, H & Alaca, BE 2025, Gas Flow Sensing with a Piezoresistive Silicon Nanowire-Based MEMS Force Sensor. in 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 809-812, 38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025, Kaohsiung, Taiwan, Province of China, 19/01/25. https://doi.org/10.1109/MEMS61431.2025.10917650

Gas Flow Sensing with a Piezoresistive Silicon Nanowire-Based MEMS Force Sensor. / Demirkazik, Levent; Kerimzade, Umut; Ghourichaei, Masoud Jedari et al.
2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025. Institute of Electrical and Electronics Engineers Inc., 2025. p. 809-812 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - Gas Flow Sensing with a Piezoresistive Silicon Nanowire-Based MEMS Force Sensor

AU - Demirkazik, Levent

AU - Kerimzade, Umut

AU - Ghourichaei, Masoud Jedari

AU - Aydin, Onur

AU - Aksoy, Bekir

AU - Aydogan, Cemal

AU - Nadar, Gokhan

AU - Rangelow, Ivo W.

AU - Yalcinkaya, Arda Deniz

AU - Bayraktar, Halil

AU - Alaca, Burhanettin Erdem

PY - 2025

Y1 - 2025

N2 - This paper introduces a novel flow sensor involving suspended piezoresistive silicon nanowires embedded in a MEMS platform. A highly linear response with a sensitivity of 6.26×10-4 (m/s)-1 is achieved within the velocity range of about 20 - 40 m/s. This translates to a very high sensitivity per effective sensing area, 7.37 ppm (m/s)-1 μm-2, and 1 nW power consumption, while operating over a velocity range similar to conventional bulky cantilever and diaphragm-based sensors. Further characterization performed at varying distances above the sensor surface demonstrates a spatial sensitivity of 4.90×10-3 mm-1. Sensor design enables high-density array operation where each MEMS unit acts as a force measurement pixel to analyze velocity gradients in various microfluidic flows with minimized power consumption and footprint.

AB - This paper introduces a novel flow sensor involving suspended piezoresistive silicon nanowires embedded in a MEMS platform. A highly linear response with a sensitivity of 6.26×10-4 (m/s)-1 is achieved within the velocity range of about 20 - 40 m/s. This translates to a very high sensitivity per effective sensing area, 7.37 ppm (m/s)-1 μm-2, and 1 nW power consumption, while operating over a velocity range similar to conventional bulky cantilever and diaphragm-based sensors. Further characterization performed at varying distances above the sensor surface demonstrates a spatial sensitivity of 4.90×10-3 mm-1. Sensor design enables high-density array operation where each MEMS unit acts as a force measurement pixel to analyze velocity gradients in various microfluidic flows with minimized power consumption and footprint.

KW - Flow sensing

KW - Force Sensor

KW - Low Power

KW - Piezoresistive

KW - Silicon Nanowire

UR - https://www.scopus.com/pages/publications/105001663616

U2 - 10.1109/MEMS61431.2025.10917650

DO - 10.1109/MEMS61431.2025.10917650

M3 - Conference contribution

AN - SCOPUS:105001663616

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 809

EP - 812

BT - 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025

Y2 - 19 January 2025 through 23 January 2025

ER -

Demirkazik L, Kerimzade U, Ghourichaei MJ, Aydin O, Aksoy B, Aydogan C et al. Gas Flow Sensing with a Piezoresistive Silicon Nanowire-Based MEMS Force Sensor. In 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025. Institute of Electrical and Electronics Engineers Inc. 2025. p. 809-812. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMS61431.2025.10917650

Gas Flow Sensing with a Piezoresistive Silicon Nanowire-Based MEMS Force Sensor

Abstract

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Bibliographical note

Keywords

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