Fiber temperature sensor utilizing a thermomechanical MEMS detector

Keyphrases

• Response Time 100%
• Mem-element 100%
• Thermo-Mechanical MEMS 100%
• Optical Fiber Temperature Sensor 100%
• Out-of-plane Displacement 50%
• Rutile 50%
• Photodetector 50%
• Collimating 50%
• Diffraction Grating 50%
• Standard Optical Fibers 50%
• Temperature Sensitivity 50%
• Changing Temperature 50%
• Measurement Range 50%
• Laser Source 50%
• Novel Architectures 50%
• Parylene 50%
• Reference Measurements 50%
• Detector Elements 50%
• Single-mode Fiber 50%
• Time Constant Measurement 50%
• Graded Index Lens 50%
• Fiber Tip 50%
• Fiber Sensor 50%
• In-line Interferometer 50%
• MEMS Membrane 50%
• Bi-material Structure 50%
• Novel Fiber 50%

Engineering

• Response Time 100%
• Thermal Sensor 100%
• Constant Temperature 50%
• Measurement Constant 50%
• Constant Time 50%
• Measurement Range 50%
• Fiber Output 50%
• Detector Element 50%
• Single Mode Fibers 50%
• Graded Index 50%
• Photometer 50%
• Fiber Optics 50%

Material Science

• Titanium 100%
• Thermal Sensor 100%
• Photosensor 100%
• Interferometer 100%
• Laser Source 100%
• Glass Fiber 100%