Fiber temperature sensor utilizing a thermomechanical MEMS detector

H. Ozan Çirkinolu; Habib Bilgin; Fehmi Çivitci; Hamdi Torun; Onur Ferhanoglu

doi:10.1117/12.2237134

Fiber temperature sensor utilizing a thermomechanical MEMS detector

H. Ozan Çirkinolu, Habib Bilgin, Fehmi Çivitci, Hamdi Torun, Onur Ferhanoglu

Department of Electronics and Communication Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We propose a novel fiber sensor utilizing a thermomechanical MEMS element at the fiber tip. Owing to its Parylene/Titanium bimaterial structure, the MEMS membrane exhibits an out-of plane displacement with changing temperature. Together with the MEMS element, the embedded diffraction grating forms an in-line interferometer, from which the displacement as well as the temperature can be deduced. The fabricated detector is placed at the single-mode fiber output that is collimated via a graded index lens. This novel architecture allows for integrating MEMS detectors on standard optical fibers, and easy substitution of the MEMS detector element to alter the measurement range and the response time of the sensor.Temperature and time-constant measurements are provided and verified with reference measurements, revealing better than 20 mK temperature sensitivity and 2.5 msec response time, using low-cost laser source and photodetectors.

Original language	English
Title of host publication	Photonic Fiber and Crystal Devices
Subtitle of host publication	Advances in Materials and Innovations in Device Applications X
Editors	Ruyan Guo, Shizhuo Yin
Publisher	SPIE
ISBN (Electronic)	9781510603073
DOIs	https://doi.org/10.1117/12.2237134
Publication status	Published - 2016
Event	Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications X - San Diego, United States Duration: 28 Aug 2016 → 29 Aug 2016

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	9958
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Conference

Conference	Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications X
Country/Territory	United States
City	San Diego
Period	28/08/16 → 29/08/16

Bibliographical note

Publisher Copyright:
© 2016 SPIE.

Keywords

Microelectomechanical devices
Optical device fabrication
Optical fiber applications
Temperature measurement

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10.1117/12.2237134

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Çirkinolu, H. O., Bilgin, H., Çivitci, F., Torun, H., & Ferhanoglu, O. (2016). Fiber temperature sensor utilizing a thermomechanical MEMS detector. In R. Guo, & S. Yin (Eds.), Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications X Article 995813 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9958). SPIE. https://doi.org/10.1117/12.2237134

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title = "Fiber temperature sensor utilizing a thermomechanical MEMS detector",

abstract = "We propose a novel fiber sensor utilizing a thermomechanical MEMS element at the fiber tip. Owing to its Parylene/Titanium bimaterial structure, the MEMS membrane exhibits an out-of plane displacement with changing temperature. Together with the MEMS element, the embedded diffraction grating forms an in-line interferometer, from which the displacement as well as the temperature can be deduced. The fabricated detector is placed at the single-mode fiber output that is collimated via a graded index lens. This novel architecture allows for integrating MEMS detectors on standard optical fibers, and easy substitution of the MEMS detector element to alter the measurement range and the response time of the sensor.Temperature and time-constant measurements are provided and verified with reference measurements, revealing better than 20 mK temperature sensitivity and 2.5 msec response time, using low-cost laser source and photodetectors.",

keywords = "Microelectomechanical devices, Optical device fabrication, Optical fiber applications, Temperature measurement",

author = "{\c C}irkinolu, {H. Ozan} and Habib Bilgin and Fehmi {\c C}ivitci and Hamdi Torun and Onur Ferhanoglu",

note = "Publisher Copyright: {\textcopyright} 2016 SPIE.; Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications X ; Conference date: 28-08-2016 Through 29-08-2016",

year = "2016",

doi = "10.1117/12.2237134",

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Çirkinolu, HO, Bilgin, H, Çivitci, F, Torun, H & Ferhanoglu, O 2016, Fiber temperature sensor utilizing a thermomechanical MEMS detector. in R Guo & S Yin (eds), Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications X., 995813, Proceedings of SPIE - The International Society for Optical Engineering, vol. 9958, SPIE, Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications X, San Diego, United States, 28/08/16. https://doi.org/10.1117/12.2237134

Fiber temperature sensor utilizing a thermomechanical MEMS detector. / Çirkinolu, H. Ozan; Bilgin, Habib; Çivitci, Fehmi et al.
Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications X. ed. / Ruyan Guo; Shizhuo Yin. SPIE, 2016. 995813 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9958).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - Fiber temperature sensor utilizing a thermomechanical MEMS detector

AU - Çirkinolu, H. Ozan

AU - Bilgin, Habib

AU - Çivitci, Fehmi

AU - Torun, Hamdi

AU - Ferhanoglu, Onur

PY - 2016

Y1 - 2016

N2 - We propose a novel fiber sensor utilizing a thermomechanical MEMS element at the fiber tip. Owing to its Parylene/Titanium bimaterial structure, the MEMS membrane exhibits an out-of plane displacement with changing temperature. Together with the MEMS element, the embedded diffraction grating forms an in-line interferometer, from which the displacement as well as the temperature can be deduced. The fabricated detector is placed at the single-mode fiber output that is collimated via a graded index lens. This novel architecture allows for integrating MEMS detectors on standard optical fibers, and easy substitution of the MEMS detector element to alter the measurement range and the response time of the sensor.Temperature and time-constant measurements are provided and verified with reference measurements, revealing better than 20 mK temperature sensitivity and 2.5 msec response time, using low-cost laser source and photodetectors.

AB - We propose a novel fiber sensor utilizing a thermomechanical MEMS element at the fiber tip. Owing to its Parylene/Titanium bimaterial structure, the MEMS membrane exhibits an out-of plane displacement with changing temperature. Together with the MEMS element, the embedded diffraction grating forms an in-line interferometer, from which the displacement as well as the temperature can be deduced. The fabricated detector is placed at the single-mode fiber output that is collimated via a graded index lens. This novel architecture allows for integrating MEMS detectors on standard optical fibers, and easy substitution of the MEMS detector element to alter the measurement range and the response time of the sensor.Temperature and time-constant measurements are provided and verified with reference measurements, revealing better than 20 mK temperature sensitivity and 2.5 msec response time, using low-cost laser source and photodetectors.

KW - Microelectomechanical devices

KW - Optical device fabrication

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KW - Temperature measurement

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T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Photonic Fiber and Crystal Devices

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Çirkinolu HO, Bilgin H, Çivitci F, Torun H, Ferhanoglu O. Fiber temperature sensor utilizing a thermomechanical MEMS detector. In Guo R, Yin S, editors, Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications X. SPIE. 2016. 995813. (Proceedings of SPIE - The International Society for Optical Engineering). doi: 10.1117/12.2237134

Fiber temperature sensor utilizing a thermomechanical MEMS detector

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