Fabrication of nanometer-size structures in metal thin films using femtosecond laser Bessel beams

B. Yalizay; T. Ersoy; B. Soylu; S. Akturk

doi:10.1063/1.3678030

Fabrication of nanometer-size structures in metal thin films using femtosecond laser Bessel beams

B. Yalizay^*, T. Ersoy, B. Soylu, S. Akturk

^*Corresponding author for this work

Department of Physics Engineering

Istanbul Technical University

Research output: Contribution to journal › Article › peer-review

55 Citations (Scopus)

Abstract

We report nanometer-scale fabrication on metal thin films using ablation by femtosecond laser pulses, with Bessel beam profiles. Choosing the laser fluence around ablation threshold allows control of the structure size below the diffraction limit. We show that using Bessel beams has several advantages. Bessel beams have focal spot sizes insensitive to longitudinal position, which significantly relaxes alignment constraints. Tighter foci are easier to generate, less costly, and less prone to aberrations. Scaling the method to shorter wavelengths, and hence increasing the resolution is also straightforward. By using the proposed method, we generate structures with resolution below 200 nm.

Original language	English
Article number	031104
Journal	Applied Physics Letters
Volume	100
Issue number	3
DOIs	https://doi.org/10.1063/1.3678030
Publication status	Published - 16 Jan 2012

Funding

This work was supported by Scientifc and Technological Research Council of Turkey (TUBITAK, Grant Number 110T330), Istanbul Technical University Mechatronics Center for Education and Research (ITU MEAM), Istanbul Technical University Scientific Research Projects Department (ITU BAP, project number 33852), and Turkish Academy of Sciences (TUBA GEBIP). We are also grateful to O. Gurlu of ITU and National Nanotechnology Research Center (UNAM) for their help with sample preparation and analysis.

Funders	Funder number
ITU BAP	33852
ITU MEAM
Istanbul Technical University Mechatronics Center for Education and Research
Istanbul Technical University Scientific Research Projects Department
Scientifc and Technological Research Council of Turkey
TUBA
TUBITAK	110T330
Türkiye Bilimler Akademisi

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abstract = "We report nanometer-scale fabrication on metal thin films using ablation by femtosecond laser pulses, with Bessel beam profiles. Choosing the laser fluence around ablation threshold allows control of the structure size below the diffraction limit. We show that using Bessel beams has several advantages. Bessel beams have focal spot sizes insensitive to longitudinal position, which significantly relaxes alignment constraints. Tighter foci are easier to generate, less costly, and less prone to aberrations. Scaling the method to shorter wavelengths, and hence increasing the resolution is also straightforward. By using the proposed method, we generate structures with resolution below 200 nm.",

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Fabrication of nanometer-size structures in metal thin films using femtosecond laser Bessel beams

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