Abstract
In this paper we present fabrication steps for manufacturing MEMS based magnetometer which is actuated by Lorentz force in the middle point of beam which has been fixed from both two edges (Clamped - Clamped). We utilized two different process sequences in order to fabricate microsystems properly. The structures were first fabricated on bulk Si-wafer and the fabrication of these sensors was characterized by built in stress in the beam and etching methods in the processes. The second approach was performed on SOI Si-wafer. Two fabrication routes are compared in terms of working MEMS structures. The microstructures are manufactured successfully by a process sequence based on SOI-Si wafer.
| Original language | English |
|---|---|
| Title of host publication | Science and Engineering of Materials |
| Publisher | Trans Tech Publications Ltd |
| Pages | 106-110 |
| Number of pages | 5 |
| ISBN (Print) | 9783038350927 |
| DOIs | |
| Publication status | Published - 2014 |
| Event | 1st International Conference on Science and Engineering of Materials, ICoSEM 2013 - Kuala Lumpur, Malaysia Duration: 13 Nov 2013 → 14 Nov 2013 |
Publication series
| Name | Advanced Materials Research |
|---|---|
| Volume | 970 |
| ISSN (Print) | 1022-6680 |
| ISSN (Electronic) | 1662-8985 |
Conference
| Conference | 1st International Conference on Science and Engineering of Materials, ICoSEM 2013 |
|---|---|
| Country/Territory | Malaysia |
| City | Kuala Lumpur |
| Period | 13/11/13 → 14/11/13 |
UN SDGs
This output contributes to the following UN Sustainable Development Goals (SDGs)
-
SDG 9 Industry, Innovation, and Infrastructure
Keywords
- Lorentz force
- MEMS
- Resonant Magnetometer
Fingerprint
Dive into the research topics of 'Fabrication method of MEMS based Clamped-Clamped resonant magnetometer'. Together they form a unique fingerprint.Cite this
- APA
- Author
- BIBTEX
- Harvard
- Standard
- RIS
- Vancouver