Enhanced field ionization current enabled by gold induced surface states to silicon nanowires

Hakan Karaagac*, M. Saif Islam

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The employment of nanosized materials has gained much interest for the fabrication of field ionization gas sensors (FIGS) since they have many advantageous properties such as low cost, high sensitivity and high selectivity. In this work, we introduce a physical gas sensor using Si Nanowires (NW) configured as anode. These NWs are synthesized by using electroless etching (EE) technique, a cost effective and scaleable process for vertically aligned Si NWs. A thin layer of gold (Au) coating is subsequently applied to improve the field ionization current by introducing unoccupied local states. Characterization of pristine Si NWs and Au doped Si NWs in terms of current and voltage is done under NH3 and O2 gases. Our structures show more than five orders of magnitude enhanced field ionization current due to unoccupied local states formed by Au doping.

Original languageEnglish
Title of host publicationNanoepitaxy
Subtitle of host publicationMaterials and Devices IV
DOIs
Publication statusPublished - 2012
Externally publishedYes
EventNanoepitaxy: Materials and Devices IV - San Diego, CA, United States
Duration: 15 Aug 201216 Aug 2012

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8467
ISSN (Print)0277-786X

Conference

ConferenceNanoepitaxy: Materials and Devices IV
Country/TerritoryUnited States
CitySan Diego, CA
Period15/08/1216/08/12

Keywords

  • Electroless etching technique
  • Field ionization gas sensor
  • Nanowires

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