Dynamic behaviour of a novel compliant mems force amplifier by matlab/simulink

Ergin Kosa*, Levent Trabzon, Umit Sonmez

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review


In last decades, compliant amplifiers are significant in enabling high output forces for themicro actuators and due to its monolithicstructure; it is well suited for MEMS applications. In this study, the dynamic approach of novel compliant mems force amplifier is tried to beevaluated by modeling its rigid body mechanism by matlab/simulink. Kinematic analysis is able to be obtained by velocity and acceleration model in simulink. Dynamic response of memsamplifier is validated at ramp input function and it is claimed that the output force goes to infinity at zero-crank angle. Only small crank rotationat about 2.3° gives approximately 2650 timesforce amplification.

Original languageEnglish
Pages (from-to)1541-1547
Number of pages7
JournalAdvanced Materials Research
Publication statusPublished - 2012
Event3rd international Conference on Manufacturing Science and Engineering, ICMSE 2012 - Xiamen, China
Duration: 27 Mar 201229 Mar 2012


  • Compliant
  • Dynamic analysis
  • Force amplifier
  • MEMS
  • Micromechanism
  • Simulink


Dive into the research topics of 'Dynamic behaviour of a novel compliant mems force amplifier by matlab/simulink'. Together they form a unique fingerprint.

Cite this