Double Facet Coated Substrate transmittance model for Cd-doped ZnO thin films

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2 Citations (Scopus)


The sol-gel method was used to grow Cd-doped ZnO (Zn1-xCdxO) (x ​= ​0.00, 0.01, 0.02, 0.03, 0.04, and 0.05) thin films to analyze the optical properties. A Double Facet Coated Substrate (DFCS) theoretical transmittance model was used to analyze the optical transmittance data and to determine the thickness, absorption loss, extinction coefficient, and refractive index of the thin films. The thicknesses and the refractive indices of the films varied in the range of 240–260 ​nm and 1.54 to 1.63, respectively. The extinction coefficient follows the dispersion relation of Sellmeier and increases with the Cd concentration while the optical band gap declines as Cd increases from 0.0 to 0.05. On the other hand, 5% of doped Cd films have the highest Urbach energy 85±15 ​meV. For the structural analysis and determination of surface morphology, we used X-ray diffraction and a scanning electron microscope. For the elemental compositions of the thin films, electron dispersive spectroscopy was used. The study demonstrates the successful application of the DFCS model for accurate determination of refractive index and extinction coefficient which are two essential parameters in the modeling of photolithographic processes in the semiconductor industry.

Original languageEnglish
Article number107114
JournalMicro and Nanostructures
Publication statusPublished - Mar 2022

Bibliographical note

Publisher Copyright:
© 2021


The author is grateful for the suggestions and comments made by the referees and thanks to the members of the lab of Bahcesehir University - Istanbul, Turkey and Sarper Ozharar (NEC Inc. New Jersey, USA) for their constructive comments and for providing XRD, EDX, and SEM data.

FundersFunder number
Istanbul, Turkey and Sarper Ozharar
Bahçeşehir Üniversitesi


    • Extinction coefficient
    • Refractive index
    • Thin films
    • Urbach energy
    • ZnO


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